AD22304

±80°/s Single Chip Yaw Rate Gyro with Signal Conditioning AD22304 FEATURES Complete rate gyroscope on a single chip Z-axis (yaw rate) response High vibration rejection over wide frequency 0.05°/s/√Hz noise 2000 g powered shock survivability Self-test on digital command Temperature sensor output Precision voltage reference output Absolute rate output for precision applications 5 V single-supply operation Ultrasmall and light (< 0.15 cc, < 0.5 gram) GENERAL DESCRIPTION The AD22304 is a complete angular rate sensor (gyroscope) that uses Analog Devices’ surface-micromachining process to make a functionally complete and low cost angular rate sensor integrated with all of the required electronics on one chip. The manufacturing technique for this device is the same high volume BIMOS process used for high reliability automotive airbag accelerometers. The output signal, RATEOUT (1B, 2A), is a voltage proportional to the angular rate about the axis normal to the top surface of the package (see Figure 2). A single external resistor can be used to lower the scale factor. An external capacitor is used to set the bandwidth. Other external capacitors are required for operation (see Figure 22). A precision reference and a temperature output are also provided for compensation techniques. Two digital self-test inputs electromechanically excite the sensor to test the operation of both sensors and the signal conditioning circuits. The AD22304 is available in a 7 mm × 7 mm × 3 mm BGA surface-mo...