AXO215

Tronic’s Microsystems S.A. 98 rue du Pré de l’Horme, 38920 Crolles, France Phone: +33 (0)4 76 97 29 50 Fax: +33 (0)4 76 97 29 51 www.tronicsgroup.com AXO215 Datasheet MCD006-C Features In-plane linear accelerometer ±15 g range Superior non-linearity of 100 ppm thanks to the closed-loop operation Excellent bias instability of 3 µg 24 bit output with digital SPI interface Ultra low noise Embedded temperature sensor for on-chip or external temperature compensation Built-in Self-Test 12x12mm hermetic J-Lead ceramic package Weight : 1.4 grams Full compatibility with GYPRO® products REACH and RoHS compliant General Description AXO215 sensors consist in a MEMS transducer and an integrated circuit (IC) packaged in a 28-pins J-leaded Ceramic Package. AXO® product is ideally complementing the industry-standard GYPRO® product line. The MEMS transducer is manufactured using Tronics’ waferlevel packaging technology based on micro-machined thick single crystal silicon. When the sensor is subjected to a linear acceleration, the acceleration acts on the proof-mass, which is itself counterbalanced by electrostatic forces (closed-loop operation). The sensor is factory calibrated and compensated for temperature effects to provide high-accuracy digital output over a broad temperature range. Raw data output can be also chosen to enable customer-made compensations. Table of Contents Features ...................................................................................