MS7212-A2

PRELIMINARY MS7212-A2 Hermetic Pressure Sensor Die (0-12 bar) 0 to 1200 kPa range (12 bar or 174 PSI) Absolute pressure sensor Hermetic sensor, temperature up to 150°C Pads on one side For harsh environment RoHS-compatible & Pb-free1 DESCRIPTION The MS7212-A2 is an absolute silicon micro-machined pressure sensor for harsh environment, with the pads on one side. A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a glass cap. The pressure, applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane. To improve the sensor stability, a drilled glass is bonded on the backside. As the pressure port consists of glass and silicon, both stable in most of the chemicals, the MS7212-A2 is suitable for media-resistive applications. FEATURES Media resistive pressure sensor die Output Span 150 mV @ 5 V Temperature Range -40 °C … + 150 °C Linearity 0.05...