MS761

MS761 PRESSURE SENSOR DIE (0-1 BAR) 0 to 100 kPa bar range (1 bar or 14.5 PSI) High Sensitivity ROHS-Compatible & Pb-free1 DESCRIPTION The sensor element of the MS761A consists of a silicon micro-machined membrane with a Pyrex glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor (MS761-A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor (S-761-D) has a hole in the Pyrex glass at the backside of the sensor. FEATURES Uncompensated pressure sensor die High Sensitivity: Output Span 240 mV @ 5V Temperature Range -40°C …+ 125°C Linearity 0.15 % (typical) Small Die Size 2.00 X 1.86 mm Low cost, High reliability APPLICATION For high resolution absolute sensor systems Engine Controls Barometers, Altimeters, Variometers ELECTRICAL CONNECTIONS Positive output for pressure applied topside Vs+ EPI Out+ Out- GND1 GND2 Vs+ : Supply voltage of Wheatstone bridge Epi : Connection of epitaxial layer (membrane) Out- : Negative output Out+ : Positive output GND1 : Ground GND2 : Ground 1 The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment) bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers (PBDE). DA761_002.doc 00000761348 ENC922 May 9, 2007 1/4 PAD OUT Vs+ Epi Out- MS761 Out+ LAYOUT ...