MS7901
PRESSURE SENSOR DIE (0-1 BAR)
• 0 to 100 kPa range (1 bar or 14.5 PSI)
• Absolute/differential pressure sensors...
MS7901
PRESSURE SENSOR DIE (0-1 BAR)
0 to 100 kPa range (1 bar or 14.5 PSI)
Absolute/differential pressure sensors RoHS-compatible & Pb-free1
DESCRIPTION
The sensor element of the MS7901 consists of a silicon micro-machined membrane. Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This sensor, which has outstanding linearity and span values, is available in various configurations. The absolute pressure sensor employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer used for this sealing has a thickness of 0.2 mm (MS7901-A_0.2) or 0.5 mm (MS7901-A_0.5). There are two gauge versions available: one with a drilled Pyrex glass (MS7901-D) and the other without Pyrex glass (MS7901-S).
FEATURES
Uncompensated pressure sensor die Output span 150mV @ 5V Temperature range -40°…+125°C
Linearity 0.05% (typical) Very small die size 1.78 x 1.78 mm (MS7901-A) Low cost, high reliability
APPLICATION
Absolute pressure sensor systems Differential/gauge pressure sensor systems
Barometers, altimeters Variometers
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+ / EPI
Vs+ : Supply
voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out- : Negative output
Out+
Out-
Out+ : Positive output GND1 : Ground
GND2 : Ground R5+ R6+ R5+ : Reference Resistor 5: positive access
R5 and R6 are
GND1 GND2
pl...