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MS7905

Intersema

PRESSURE SENSOR DIE

MS7905 PRESSURE SENSOR DIE (0-5 BAR) • 0 to 500 kPa range (5 bar or 73 PSI) • Absolute/differential pressure sensors •...


Intersema

MS7905

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Description
MS7905 PRESSURE SENSOR DIE (0-5 BAR) 0 to 500 kPa range (5 bar or 73 PSI) Absolute/differential pressure sensors High linearity, small size High overpressure capability (18 bar) RoHS-compatible & Pb-free1 DESCRIPTION The sensor element of the MS7905 consists of a silicon micro-machined membrane. Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This sensor, which has outstanding linearity and span values, is available in various configurations. The absolute pressure sensor employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer used for this sealing has a thickness of 0.2 mm (MS7905-A_0.2) or 0.5 mm (MS7905-A_0.5). Two gauge versions are available: one with a drilled Pyrex glass (MS7905-D) and the other without Pyrex glass (MS7905-S). FEATURES Uncompensated pressure sensor die Output span 150mV @ 5V Temperature range -40°…+125°C Linearity 0.05% (typical) Very small die size 1.72 x 1.58 mm (MS7905-A) Low cost, high reliability APPLICATION Absolute pressure sensor systems Differential/gauge pressure sensor systems Engine controls Dive computers ELECTRICAL CONNECTIONS Positive output for pressure applied topside Vs+ EPI Out+ Out- GND1 GND2 Vs+ : Supply voltage of Wheatstone bridge Epi : Connection of epitaxial layer (membrane) Out- : Negative output Out+ : Positive output GND1 : Ground GND2 : Ground 1 The European RoHS...




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