MS7970
PRESSURE SENSOR DIE (0-70 BAR)
• 0 to 7000 kPa range (70 bar or 1015 PSI)
• Absolute/differential pressure sens...
MS7970
PRESSURE SENSOR DIE (0-70 BAR)
0 to 7000 kPa range (70 bar or 1015 PSI)
Absolute/differential pressure sensors
High linearity, small size RoHS-compatible & Pb-free1
DESCRIPTION
The sensor element of the MS7970 consists of a silicon micro-machined membrane. Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This sensor, which has outstanding linearity and span values, is available in various configurations. The absolute pressure sensor employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer used for this sealing has a thickness of 0.2 mm (MS7970-A_0.2) or 0.5 mm (MS7970-A_0.5). There are two gauge versions available: one with a drilled Pyrex glass (MS7970-D) and the other without Pyrex glass (MS7970-S).
FEATURES
Uncompensated pressure sensor die Output span 310mV @ 5V Temperature range -40°…+125°C
Linearity 0.25% (typical) Very small die size 1.72 x 1.58 mm (MS7970-A) Low cost, high reliability
APPLICATION
Absolute pressure sensor systems Differential/gauge pressure sensor systems
Engine controls Dive computers
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside Vs+ EPI
Out+
Out-
Vs+ : Supply
voltage of Wheatstone bridge Epi : Connection of epitaxial layer (membrane) Out- : Negative output Out+ : Positive output GND1 : Ground GND2 : Ground
GND1 GND2
1 The European RoHS directive 2002/95/EC (Restric...