MFC2000

High Performance Bi-Directional Digital MEMS Gas Flow Sensor FEATURES  Bi-directional flow (±30 or ±70SLM)  High dynamic range  ±3% m.v. accuracy  ±0.8% m.v. repeatability  Low power consumption  Fast response time  Single 2.7 - 5.5Vdc power supply  Digital I2C output  Standard push-in fitting sizes  Custom fluid connector available  Temperature compensated  Highly configurable firmware  Easy-to-use PC-based GUI  RoHS and WEEE compliant APPLICATIONS  Medical gas flow measurement and control  Industrial gas flow measurement and control  Consumer products DESCRIPTION MFC2000 series is a new gas flow sensing module platform based on ACEINNA’s proprietary CMOS technology for thermal mass flow sensing. It can measure up to 70 SLM bi-directional flow rate with +/3.0% accuracy. The sensing element is monolithically integrated with CMOS signal processing circuitry and embedded software capable of converting gas flow rates to a digital o...