Document
High Performance Bi-Directional Digital MEMS Gas Flow Sensor
FEATURES Bi-directional flow (±30 or ±70SLM) High dynamic range ±3% m.v. accuracy ±0.8% m.v. repeatability Low power consumption Fast response time Single 2.7 - 5.5Vdc power supply Digital I2C output Standard push-in fitting sizes Custom fluid connector available Temperature compensated Highly configurable firmware Easy-to-use PC-based GUI RoHS and WEEE compliant
APPLICATIONS
Medical gas flow measurement and control Industrial gas flow measurement and control Consumer products
DESCRIPTION
MFC2000 series is a new gas flow sensing module platform based on ACEINNA’s proprietary CMOS technology for thermal mass flow sensing. It can measure up to 70 SLM bi-directional flow rate with +/3.0% accuracy.
The sensing element is monolithically integrated with CMOS signal processing circuitry and embedded software capable of converting gas flow rates to a digital o.