Document
± 10g Tri-axis Accelerometer Specifications
PART NUMBER:
KXD94-2802 Rev. 2
May-2014
Product Description
The KXD94-2802 is a Tri-axis, silicon micromachined accelerometer with a full-scale output range of +/-10g (98 m/s/s). The sense element is fabricated using Kionix’s proprietary plasma micromachining process technology. Acceleration sensing is based on the principle of a differential capacitance arising from acceleration-induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit. A separate ASIC device packaged with the sense element provides signal conditioning and self-test. The accelerometer is delivered in a 5 x 5 x 1.2 mm DFN plastic package operating from a 2.50V - 5.25V DC supply. The three outputs (X, Y, Z) are provided on analog output.