Tri-axis Analog Accelerometer
± 2g Tri-axis Analog Accelerometer Specifications
PART NUMBER:
KXSC4-2050 Rev. 3
Dec-2009
Product Description
The KXSC...
Description
± 2g Tri-axis Analog Accelerometer Specifications
PART NUMBER:
KXSC4-2050 Rev. 3
Dec-2009
Product Description
The KXSC4-2050 is a Tri-axis, silicon micromachined accelerometer with a full-scale output range of +/-2g (19.6 m/s/s). The sense element is fabricated using Kionix’s proprietary plasma micromachining process technology. Acceleration sensing is based on the principle of a differential capacitance arising from acceleration-induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit. A separate ASIC device packaged with the sense element provides signal conditioning and self-test. The accelerometer is delivered in a 5 x 5 x 1.2mm Dual Flat No-lead (DFN) plastic package operating from a 1.8 – 3.6V DC supply.
Functional Diagram
X Sensor
Y S...
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