MiCS-6814 Data Sheet 1143 rev 8
The MiCS-6814 is a compact MOS sensor with three fully independent sensing elements on one package.
The MiCS-6814 is a robust MEMS sensor for the detection of pollution from automobile exhausts and for agricultural/industrial odors.
Features
Smallest footprint for compact designs (5 x 7 x 1.55 mm) Robust MEMS sensor for...