SCA61T inclinometer Datasheet

SCA61T Datasheet, PDF, Equivalent


Part Number

SCA61T

Description

3D-MEMS-based single axis inclinometer

Manufacture

Murata

Total Page 17 Pages
Datasheet
Download SCA61T Datasheet


SCA61T
Data Sheet
SCA61T Series
THE SCA61T INCLINOMETER SERIES
The SCA61T Series is a 3D-MEMS-based single axis inclinometer family that provides instrumentation grade
performance for leveling applications. Low temperature dependency, high resolution and low noise together with
robust sensing element design make the SCA61T ideal choice for leveling instruments. The Murata inclinometers
are insensitive to vibration, due to their over damped sensing elements and can withstand mechanical shocks of
20000 g.
Features
Measuring ranges ±30° SCA61T-FAHH1G
and ± 90° SCA61T-FA1H1G
0.0025° resolution (10 Hz BW, analog output)
Sensing element controlled over damped
frequency response (-3dB 18Hz)
Robust design, high shock durability (20000g)
Excellent stability over temperature and time
Single +5 V supply
Ratiometric analog voltage outputs
Digital SPI inclination and temperature output
Comprehensive failure detection features
o True self test by deflecting the sensing
elements’ proof mass by electrostatic force.
o Continuous sensing element interconnection
failure check.
o Continuous memory parity check.
RoHS compliant
Compatible with Pb-free reflow solder process
Applications
Platform leveling and stabilization
Leveling instruments
Acceleration and motion measurement
6 ST
Sensing
element
Self test 1
8 VDD
Signal conditioning
and filtering
EEPROM
calibration
memory
Temperature
Sensor
A/D conversion
SPI interface
Figure 1.
4 GND
Functional block diagram
7 OUT
1 SCK
2 MISO
3 MOSI
5 CSB
www.murata.com
Subject to changes
Doc. nr. 8261900
1/17
Rev.A3

SCA61T
SCA61T Series
TABLE OF CONTENTS
The SCA61T Inclinometer Series.............................................................................................1
Features............................................................................................................................................. 1
Applications ...................................................................................................................................... 1
Table of Contents......................................................................................................................2
1 Electrical Specifications .....................................................................................................3
1.1 Absolute Maximum Ratings ................................................................................................... 3
1.2 Performance Characteristics.................................................................................................. 3
1.3 Electrical Characteristics ....................................................................................................... 4
1.4 SPI Interface DC Characteristics............................................................................................ 4
1.5 SPI Interface AC Characteristics............................................................................................ 4
1.6 SPI Interface Timing Specifications....................................................................................... 5
1.7 Electrical Connection.............................................................................................................. 6
1.8 Typical Performance Characteristics .................................................................................... 6
1.9 Additional External Compensation ........................................................................................ 7
2 Functional Description .......................................................................................................9
2.1 Measuring Directions.............................................................................................................. 9
2.2 Voltage to Angle Conversion ................................................................................................. 9
2.3 Ratiometric Output................................................................................................................ 10
2.4 SPI Serial Interface................................................................................................................ 10
2.5 Digital Output to Angle Conversion..................................................................................... 12
2.6 Self Test and Failure Detection Modes................................................................................ 13
2.7 Temperature Measurement .................................................................................................. 14
3 Application Information ....................................................................................................15
3.1 Recommended Circuit Diagrams and Printed Circuit Board Layouts ............................... 15
3.2 Recommended Printed Circuit Board Footprint ................................................................. 16
4 Mechanical Specifications and Reflow Soldering ..........................................................16
4.1 Mechanical Specifications (Reference only) ....................................................................... 16
4.2 Reflow Soldering................................................................................................................... 17
www.murata.com
Subject to changes
Doc. nr. 8261900
2/17
Rev.A3


Features Data Sheet SCA61T Series THE SCA61T IN CLINOMETER SERIES The SCA61T Series is a 3D-MEMS-based single axis inclinomet er family that provides instrumentation grade performance for leveling applica tions. Low temperature dependency, high resolution and low noise together with robust sensing element design make the SCA61T ideal choice for leveling instr uments. The Murata inclinometers are in sensitive to vibration, due to their ov er damped sensing elements and can with stand mechanical shocks of 20000 g. Fe atures • Measuring ranges ±30° SCA6 1T-FAHH1G and ± 90° SCA61T-FA1H1G • 0.0025° resolution (10 Hz BW, analog output) • Sensing element controlled over damped frequency response (-3dB 18 Hz) • Robust design, high shock durab ility (20000g) • Excellent stability over temperature and time • Single +5 V supply • Ratiometric analog voltag e outputs • Digital SPI inclination and temperature output • Comprehensiv e failure detection features o True self test by deflecting the sensing elements’ proo.
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