SCA61T

Data Sheet SCA61T Series THE SCA61T INCLINOMETER SERIES The SCA61T Series is a 3D-MEMS-based single axis inclinometer family that provides instrumentation grade performance for leveling applications. Low temperature dependency, high resolution and low noise together with robust sensing element design make the SCA61T ideal choice for leveling instruments. The Murata inclinometers are insensitive to vibration, due to their over damped sensing elements and can withstand mechanical shocks of 20000 g. Features Measuring ranges ±30° SCA61T-FAHH1G and ± 90° SCA61T-FA1H1G 0.0025° resolution (10 Hz BW, analog output) Sensing element controlled over damped frequency response (-3dB 18Hz) Robust design, high shock durability (20000g) Excellent stability over temperature and time Single +5 V supply Ratiometric analog voltage outputs Digital SPI inclination and temperature output Comprehensive failure detection features o True self test by deflecting the sensing elements’ proof mass by electrostatic force. o Continuous sensing element interconnection failure check. o Continuous memory parity check. RoHS compliant Compatible with Pb-free reflow solder process Applications Platform leveling and stabilization Leveling instruments Acceleration and motion measurement 6 ST Sensing element Self test 1 8 VDD Signal conditioning and filtering EEPROM calibration memory Temperature Sensor A/D conversion SPI interface Figure 1. 4 GND Functional block diagram...