FS1012

FS1012 Datasheet Datasheet Description The FS1012 MEMS mass flow sensor module measures the flow rate using the thermo-transfer (calorimetric) principle. The FS1012 is capable of measuring a gas or liquid medium. The FS1012 offers key advantages over resistor-based flow solutions. The sensor utilizes thermopile sensing, which provides an excellent signal-to-noise ratio. The sensor comprises a “solid” thermal isolation technology and silicon-carbide coating to protect it from abrasive wear and provides robustness and long-term reliability. In comparison, other sensors typically contain a fragile membrane above an etched cavity for the thermal isolation base. The FS1012 features the sensor fully assembled and wire-bonded out to a 6-pin header. Wetted materials consist of a glass fiber reinforced PA66 resin, epoxy, and silicon carbide. Typical Applications  Process controls and monitoring  Oil and gas leak detection  HVAC and air control systems  CPAP and respiratory devices  Liquid dispensing system Features  Gas or liquid mediums  Robust “solid” isolation technology  Resistant to surface contamination  No cavity to cause clogging  Resistant to vibration and pressure shock  Low power application  Sensitive at low flow rates and differential pressure levels  Fast response: <5ms  Millivolt output  Supply voltage: 3V to 5V  Module operating temperature range: 0°C to +85°C FS1012 Flow Sensor Module Basic Application Circuits Figure 1. Single-Ended Circuit Examp...