for Photolithography. HSH3501PILO Datasheet

HSH3501PILO Photolithography. Datasheet pdf. Equivalent


Part HSH3501PILO
Description Lamps for Photolithography
Feature D A T A S H E E T Lighting Imaging Telecom Mercury Short Arc Lamps HSH3501PILO Lamps for Photol.
Manufacture PerkinElmer Optoelectronics
Datasheet
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D A T A S H E E T Lighting Imaging Telecom Mercury Short HSH3501PILO Datasheet
Recommendation Recommendation Datasheet HSH3501PILO Datasheet




HSH3501PILO
Lighting
Imaging
Telecom
Mercury Short Arc Lamps
HSH3501PILO
Lamps for Photolithography
Description
PerkinElmer Optoelectronics is a leading
manufacturer of mercury short arc lamps
ranging in output power from 1000 to
8000 watts. These lamps are used in the
production of printed circuit boards, liquid
crystal displays and semiconductors. The
HSH Series lamps are used worldwide in
microlithography systems manufactured
by ASML, Canon, GCA, Nikon, Karl
Suss, Ultratech Stepper, and SVG. With
extremely high stability, uniform output
distribution and extended lamp lifetimes,
the HSH Series has become the lamp
choice of many of the world’s leading
semiconductor manufacturers.
hours to more than two thousand hours.
The HSH Series provides longer lifetimes,
outstanding uniformity, and excellent
spectral quality which results in increased
throughput, reduced downtime and an
overall reduction in the cost of ownership.
PerkinElmer has been a leading manufac-
turer of high intensity arc lamps for more
than 30 years and is a premier lamp sup-
plier for solid state lasers, medical equip-
ment, NASA space systems and
microlithography. PerkinElmer has
steadily advanced lamp performance from
1000 watts to 8000 watts. With the intro-
duction of new materials and proprietary
manufacturing processes, we have extend-
ed lamp lifetimes form several hundred
www.perkinelmer.com/opto
Applications
Microlithography
.



HSH3501PILO
HSH3501PILO
Operational Specifications
Description
Power
Current
Voltage
Current Ripple
Temperature (at base)
Lifetime
Nominal
3500 watts
152 amps (DC)
23 volts (DC)
3%
220ºC (max)
1500 hours
Dimensions
Range
135-175 amps (DC)
20-26 volts (DC)
ANODE (+)
END UP
324
Max
155.5
CATHODE (-)
END DOWN
All dimensions are in millimeters.
Ø81.5
Notes
1. Lamp must be operated with anode end up and
cathode end down. Inclination of lamp axis to
vertical must not exceed 10º.
Physical Specifications
Description
Arc Gap
Anode Base
Cathode Base
Specification
4.5 mm (max)
40 mm Dia (M6)
32.5 mm Dia (M12)
Spectral Output
100
90
80
70
60
50
40
30
20
10
0
250 300 350 400 450 500 550 600 650 700 750
Wavelength (nm)
Typical Performance Graph
100
90
80
70
60
50
40
30
20
10
0
0
200
400
600
800
1000
1200
1400
Hours of Operation
Part Number References
Used In
ASML 5500 / 400
Replaces
SUV-3501-PIL
HBO-3501-W/PI
PerkinElmer welcomes inquiries about special lamps. We would be pleased to discuss the requirements of your application and the feasibility of
designing a lamp specifically suited to your needs.
For more information e-mail us at opto@perkinelmer.com or visit our web site at www.perkinelmer.com/opto.
All values are nominal; specifications subject to change without notice.
USA:
PerkinElmer Optoelectronics
44370 Christy St.
Fremont, CA 94538
Phone: (510) 979-6500
Fax: (510) 687-1140
Europe:
PerkinElmer Optoelectronics GmbH
Wenzel-Jaksch-Str. 31
65199 Wiesbaden
Germany
Phone: +49 611 492 0
Fax: +49 611 492 177
Asia:
PerkinElmer Optoelectronics
47 Ayer Rajah Crescent #06-12
Singapore 139947
Phone: +65 775 2022
Fax: +65 775 1008
.
© 2000 PerkinElmer inc. All rights reserved.
www.perkinelmer.com/opto
DS-302 Rev A 0102







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