for Photolithography. HSH3501PILO Datasheet
Mercury Short Arc Lamps
Lamps for Photolithography
PerkinElmer Optoelectronics is a leading
manufacturer of mercury short arc lamps
ranging in output power from 1000 to
8000 watts. These lamps are used in the
production of printed circuit boards, liquid
crystal displays and semiconductors. The
HSH Series lamps are used worldwide in
microlithography systems manufactured
by ASML, Canon, GCA, Nikon, Karl
Suss, Ultratech Stepper, and SVG. With
extremely high stability, uniform output
distribution and extended lamp lifetimes,
the HSH Series has become the lamp
choice of many of the world’s leading
hours to more than two thousand hours.
The HSH Series provides longer lifetimes,
outstanding uniformity, and excellent
spectral quality which results in increased
throughput, reduced downtime and an
overall reduction in the cost of ownership.
PerkinElmer has been a leading manufac-
turer of high intensity arc lamps for more
than 30 years and is a premier lamp sup-
plier for solid state lasers, medical equip-
ment, NASA space systems and
microlithography. PerkinElmer has
steadily advanced lamp performance from
1000 watts to 8000 watts. With the intro-
duction of new materials and proprietary
manufacturing processes, we have extend-
ed lamp lifetimes form several hundred
Temperature (at base)
152 amps (DC)
23 volts (DC)
135-175 amps (DC)
20-26 volts (DC)
All dimensions are in millimeters.
1. Lamp must be operated with anode end up and
cathode end down. Inclination of lamp axis to
vertical must not exceed 10º.
4.5 mm (max)
40 mm Dia (M6)
32.5 mm Dia (M12)
250 300 350 400 450 500 550 600 650 700 750
Typical Performance Graph
Hours of Operation
Part Number References
ASML 5500 / 400
PerkinElmer welcomes inquiries about special lamps. We would be pleased to discuss the requirements of your application and the feasibility of
designing a lamp specifically suited to your needs.
For more information e-mail us at email@example.com or visit our web site at www.perkinelmer.com/opto.
All values are nominal; specifications subject to change without notice.
44370 Christy St.
Fremont, CA 94538
Phone: (510) 979-6500
Fax: (510) 687-1140
PerkinElmer Optoelectronics GmbH
Phone: +49 611 492 0
Fax: +49 611 492 177
47 Ayer Rajah Crescent #06-12
Phone: +65 775 2022
Fax: +65 775 1008
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