FC260

Tylan FC260/FM360 Mass Flow Controllers and Flowmeters Low cost mass flow controllers with long-term repeatability and performance ® Process Values Designed to meet the exacting requirements of semiconductor processes and equipment, the Tylan FC260 and Tylan FM360 models are premium quality elastomer-sealed mass flow controllers and meter. These MFCs combine proven components and techniques with innovative concepts in both mechanical and electrical design. Excellent Performance Tylan FC260 qnd FM360 mass flow controllers and flowmeters accurately and reliably measure and control flow rates of gases up to 200 standard liters per minute without the need for pressure or temperature corrections. Product Features Attitude Insensitive Flow Sensor Product Benefits Eliminates air convection currents inside its case without sacrificing response speed. Can be mounted in any position without requiring zero adjustment. Superior Bypass Design to Operate under Laminar Flow Conditions Solid State Valve Assembly Constructed of Type 316 Stainless Steel Laminar Flow Assures accuracy over the entire range of mass flow controller. Easily removed for range changes. Completely compatible with reactive and corrosive materials. Design eliminates internal dead volumes. Eliminates the need for complex, interactive multi-point linearization during calibration P r o d u c t P r o f i l e Tylan FC260/FM360 MFCs and Flowmeters - Ordering Information FRONT VIEW SIDE VIEW H H1 150 PSIG MAX L L1 ...