XMMAS500G10S

MOTOROLA SEMICONDUCTOR TECHNICAL DATA Order this document by XMMAS500G/D Preliminary Information XMMAS500G10D XMMAS500G10S MICROMACHINED ACCELEROMETER ± 500g AMPLIFIED Micromachined Accelerometer ± 500g Amplified The MMAS500G family of silicon capacitive, micro–machined accelerometers features integral signal amplification, signal conditioning, a 4–pole low–pass filter and temperature compensation. Zero–G offset, full scale span and filter roll–off are factory set and require no external passives. A calibrated self–test feature mechanically displaces the seismic mass with the application of a digital self–test signal. The device is offered in either of two plastic packages, thereby accommodating various axis orientation requirements. The MMAS500G incorporates a single polysilicon seismic mass, suspended between two fixed polysilicon plates (G–cell). The forces of acceleration move the seismic mass, thereby resulting in a change in capacitance. The G–cell is sealed at the die level, creating a particle–free environment. The G–cell features built–in damping and over–range stops to protect it from mechanical shock. MMAS500G accelerometers are ideally suited for automotive crash detection and recording, vibration monitoring, automotive suspension control, appliance control systems, etc. Features Full Scale Measurement ± 500g Calibrated, True Self–Test Standard 16–Pin Plastic DIP Integral Signal Conditioning and 4–Pole Filter Linear Output Robust, High Shock Survi...