(KPY51-RK - KPY57-RK) Silicon Piezoresistive Relative Pressure Sensor
Silicon Piezoresistive Relative Pressure Sensor
KPY 51-RK KPY 57-RK
Features • • • • Low pressure and temperature hyst...
Description
Silicon Piezoresistive Relative Pressure Sensor
KPY 51-RK KPY 57-RK
Features Low pressure and temperature hysteresis Fast response High sensitivity and linearity Fatigue free monocrystaline silicon diaphragm giving high load cycle stability High long term stability Built in silicon temperature sensor Provided for further fabrication, protection cap
TO-8-6
Type and Marking KPY 51 RK KPY 52 RK KPY 53 RK KPY 54 RK KPY 55 RK KPY 56 RK KPY 57 RK Pin Configuration 1 2 3 4 5 6 7 8
Symbol
Pressure Range 0 … 0.25 0 … 0.6 0 … 1.6 0…4 0 … 10 0 … 25 0 … 60
Unit bar
Ordering Code Q62705-K189 Q62705-K190 Q62705-K191 Q62705-K193 Q62705-K195 Q62705-K197 Q62705-K199
P0 … PN
Capillary tube + VIN − VOUT Temperature sensor (typ. R25 = 2 kΩ) Temperature sensor − VIN + VOUT Not connected
Semiconductor Group
1
02.97
KPY 51-RK KPY 57-RK
Absolute Maximum Ratings Parameter Pressure overload KPY 51 RK KPY 52 RK KPY 53 RK KPY 54 RK KPY 55 RK KPY 56 RK KPY 57 RK Operating temperature range Storage temperature range Supply voltage Symbol Limit Values1) Frontside Rearside Unit bar 2 6 10 16 30 75 100 2 6 10 16 30 40 70 − 40 … + 125 − 50 … + 150 12 ˚C ˚C V
PMAX
TA Tstg VIN
1) Frontside coupling applies pressure onto chip face. Rearside coupling applies pressure through Kovar centre tube.
Electrical Characteristics at TA = 25 ˚C and VIN = 5 V, unless otherwise specified. Parameter Bridge resistance Sensitivity KPY 51 RK KPY 52 RK KPY 53 RK KPY 54 RK KPY 55 RK KPY 56 RK KPY 57...
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