(KPY62-RK - KPY66-RK) Silicon Piezoresistive Pressure Sensor
Silicon Piezoresistive Pressure Sensor
KPY 62-RK KPY 66-RK
Features • • • • Low pressure and temperature hysteresis Fa...
Description
Silicon Piezoresistive Pressure Sensor
KPY 62-RK KPY 66-RK
Features Low pressure and temperature hysteresis Fast response High sensitivity and linearity Fatigue free monocrystaline silicon diaphragm giving high load cycle stability High long term stability Built in silicon temperature sensor Metal housing
Similar to TO-39-3
Type and Marking KPY 62 RK KPY 63 RK KPY 64 RK KPY 65 RK KPY 66 RK Pin Configuration 1 2 3 4 5 6 7 8
Symbol
Pressure Range 0 … 600 0 … 1.6 0…4 0 … 10 0 … 25
Unit mbar bar
Ordering Code Q62705-K319 Q62705-K320 Q62705-K321 Q62705-K322 Q62705-K292
P0 … PN
Temp.- Sensor (typ. R25 = 2 kΩ) Not connected + VIN; Temperature sensor − VOUT No pin Shielding, to be connected to + VIN − VIN + VOUT
Semiconductor Group
1
1998-05-11
KPY 62-RK KPY 66-RK
Absolute Maximum Ratings Parameter Pressure overload KPY 65 RK KPY 66 RK Operating temperature range Storage temperature range Supply voltage Symbol Limit Values1) Frontside Rearside Unit bar 20 50 10 10 − 40 … + 125 − 40 … + 125 12 ˚C ˚C V
PMAX
TA Tstg VIN
1) Frontside coupling applies pressure onto chip face. Rearside coupling applies pressure through Kovar centre tube.
Electrical Characteristics at TA = 25 ˚C and VIN = 5 V, unless otherwise specified. Parameter Bridge resistance Sensitivity KPY 65 RK KPY 66 RK Output voltage KPY 65 RK KPY 66 RK Offset voltage P = P0 Linearity error (Best fit straight line) P0 = P0 … PN KPY 65 … 66 RK Pressure hysteresis PH P1 = P0, P2 = PN, P3 = P0 KPY 65...
Similar Datasheet