(KPY51-R - KPY57-R) Silicon Piezoresistive Relative Pressure Sensor
Silicon Piezoresistive Relative Pressure Sensor
Features • • • • Low pressure and temperature hysteresis Fast response H...
Description
Silicon Piezoresistive Relative Pressure Sensor
Features Low pressure and temperature hysteresis Fast response High sensitivity and linearity Fatigue free monocrystaline silicon diaphragm giving high load cycle stability High long term stability Built in silicon temperature sensor Media compatible stainless housing
KPY 51-R KPY 56-R
Stainless Steel Package
Type and Marking KPY 51 R KPY 52 R KPY 53 R KPY 54 R KPY 55 R KPY 56 R Pin Configuration 1 2 3 4 5 6 7 8
Symbol
Pressure Range 0 … 0.25 0 … 0.6 0 … 1.6 0…4 0 … 10 0 … 25
Unit bar
Ordering Code Q62705-K174 Q62705-K171 Q62705-K176 Q62705-K178 Q62705-K180 Q62705-K182
P0 … PN
Capillary tube + VIN − VOUT Temperature sensor (typ. R25 = 2 kΩ) Temperature sensor − VIN + VOUT Not connected
Semiconductor Group
1
02.97
KPY 51-R KPY 56-R
Absolute Maximum Ratings Parameter Pressure overload KPY 51 R KPY 52 R KPY 53 R KPY 54 R KPY 55 R KPY 56 R Operating temperature range Storage temperature range Supply voltage Symbol Limit Values1) Frontside Rearside Unit bar 2 6 10 16 30 75 2 6 10 16 30 40 − 40 … + 125 − 50 … + 130 12 ˚C ˚C V
PMAX
TA Tstg VIN
1) Frontside coupling applies pressure onto chip face. Rearside coupling applies pressure through Kovar centre tube.
Electrical Characteristics at TA = 25 ˚C and VIN = 5 V, unless otherwise specified. Parameter Bridge resistance Sensitivity KPY 51 R KPY 52 R KPY 53 R KPY 54 R KPY 55 R KPY 56 R Output voltage KPY 51 R KPY 52 R KPY 53 R KPY 54 R KPY 55 R KPY 56 R Off...
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