X-ducer SILICON PRESSURE SENSORS
MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
Order this document by MPX5999D/D
0 to 1000 kPa (0 to 150 PSI) On-Chip Signal C...
Description
MOTOROLA
SEMICONDUCTOR TECHNICAL DATA
Order this document by MPX5999D/D
0 to 1000 kPa (0 to 150 PSI) On-Chip Signal Conditioned, 0.2 V to 4.7 V Output, Temperature Compensated and Calibrated, Silicon Pressure Sensor
The MPX5999D piezoresistive transducer is a state–of–the–art pressure sensor designed for a wide range of applications, but particularly for those employing a microcontroller or microprocessor with A/D inputs. This patented, single element X–ducer combines advanced micromachining techniques, thin–film metallization and bipolar semiconductor processing to provide an accurate, high level analog output signal that is proportional to applied pressure. Figure 1 shows a block diagram of the internal circuitry integrated on the stand–alone sensing chip. Features Temperature Compensated Over 0 to 85°C Ideally Suited for Microprocessor or Microcontroller–Based Systems Patented Silicon Shear Stress Strain Gauge Durable Epoxy Unibody Element
MPX5999D
X–ducer™ SILICON PRESSURE SENSORS
BASIC CHIP CARRIER ELEMENT CASE 867–08, STYLE 1
PIN NUMBER
VS 3
1 2 3
Vout Gnd VS
4 5 6
N/C N/C N/C
X–ducer SENSING ELEMENT
THIN FILM TEMPERATURE COMPENSATION AND GAIN STAGE #1 2 GND
GAIN STAGE #2 AND GROUND REFERENCE SHIFT CIRCUITRY
1
Vout
NOTE: Pins 4, 5, and 6 are internal device connections. Do not connect to external circuitry or ground. Pin 1 is noted by the notch in the Lead.
PINS 4, 5 AND 6 ARE NO CONNECTS
Figure 1. Fully Integrated Pressure Sensor Schematic
M...
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