Document
www.DataSheet4U.com SEMICONDUCTOR TECHNICAL DATA
MOTOROLA
Freescale Semiconductor, Inc.
Order this document by MPX4115A/D
Integrated Silicon Pressure Sensor MPX4115A for Manifold Absolute Pressure, MPXA4115A Altimeter or Barometer Applications SERIES On-Chip Signal Conditioned, Temperature Compensated INTEGRATED and Calibrated
Motorola’s MPX4115A/MPXA4115A series sensor integrates on–chip, bipolar op amp circuitry and thin film resistor networks to provide a high output signal and temperature compensation. The small form factor and high reliability of on–chip integration make the Motorola pressure sensor a logical and economical choice for the system designer. The MPX4115A/MPXA4115A series piezoresistive transducer is a state–of–the–art, monolithic, signal conditioned, silicon pressure sensor. This sensor combines advanced micromachining techniques, thin film metallization, and bipolar semiconductor processing to provide an accurate, high level analog output signal that is proportional to applied pressure. Figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip. Features • 1.5% Maximum Error over 0° to 85°C • Ideally suited for Microprocessor or Microcontroller– Based Systems • Temperature Compensated from –40° to +125°C • Durable Epoxy Unibody Element or Thermoplastic (PPS) Surface Mount Package Application Examples • Aviation Altimeters • Industrial Controls • Engine Control • Weather Stations and Weather Reporting Devices
VS
PRESSURE SENSOR 15 to 115 kPa (2.2 to 16.7 psi) 0.2 to 4.8 Volts Output
Freescale Semiconductor, Inc...
UNIBODY PACKAGE
MPX4115A CASE 867
SMALL OUTLINE PACKAGE
MPXA4115A6U CASE 482
MPX4115AP CASE 867B
SENSING ELEMENT
THIN FILM TEMPERATURE COMPENSATION AND GAIN STAGE #1
GAIN STAGE #2 AND GROUND REFERENCE SHIFT CIRCUITRY
Vout
GND
PINS 1, 5, 6, 7 AND 8 ARE NO CONNECTS FOR SMALL OUTLINE PACKAGE DEVICE PINS 4, 5 AND 6 ARE NO CONNECTS FOR UNIBODY DEVICE
MPXA4115AC6U CASE 482A
MPX4115AS CASE 867E
PIN NUMBER
1 2 3 4 N/C VS Gnd Vout 5 6 7 8 N/C N/C N/C N/C 1 2 3
PIN NUMBER
Vout Gnd VS 4 5 6 N/C N/C N/C
Figure 1. Fully Integrated Pressure Sensor Schematic
REV 4
NOTE: Pins 1, 5, 6, 7, and 8 are internal device connections. Do not connect to external circuitry or ground. Pin 1 is noted by the notch in the lead.
NOTE: Pins 4, 5, and 6 are internal device connections. Do not connect to external circuitry or ground. Pin 1 is noted by the notch in the lead.
Motorola Sensor Device Data © Motorola, Inc. 2001
For More Information On This Product, Go to: www.freescale.com
1
Freescale MPX4115A MPXA4115A SERIES
MAXIMUM RATINGS(NOTE)
Parametrics Maximum Pressure (P1 u P2) Storage Temperature Operating Temperature
ARCHIVED BY FREESCALE SEMICONDUCTOR, INC. 2005
Units Pmax Tstg TA 400 –40° to +125° –40° to +125° kPa °C °C
Semiconductor, Inc.
NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device.
OPERATING CHARACTERISTICS (VS = 5.1 Vdc, TA = 25°C unless otherwise noted, P1 u P2. Decoupling circuit shown in Figure 3 required to meet Electrical Specifications.)
Characteristic Pressure Range Supply Voltage(1) Symbol POP VS Io (0 to 85°C) (0 to 85°C) (0 to 85°C) (0 to 85°C) Voff VFSO VFSS — V/P tR Io+ — — Min 15 4.85 — 0.135 4.725 4.521 — — — — — — Typ — 5.1 7.0 0.204 4.794 4.590 — 45.9 1.0 0.1 20 ±ā0.5 Max 115 5.35 10 0.273 4.863 4.659 ±1.5 — — — — — Unit kPa Vdc mAdc Vdc Vdc Vdc %VFSS mV/kPa ms mAdc ms %VFSS
Supply Current
Freescale Semiconductor, Inc...
Minimum Pressure Offset(2) @ VS = 5.1 Volts Full Scale Output(3) @ VS = 5.1 Volts Full Scale Span(4) @ VS = 5.1 Volts Accuracy(5) Sensitivity Response Time(6)
Output Source Current at Full Scale Output Warm–Up Offset Time(7)
Stability(8)
NOTES: 1. Device is ratiometric within this specified excitation range. 2. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 3. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure. 4. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 5. Accuracy is the deviation in actual output from nominal output over the entire pressure range and temperature range as a percent of span at 25°C due to all sources of error including the following: • Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. • Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. • Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum or maximum rated pressure at 25°C. • TcSpan: Output deviation over the temperature range of 0° to 85°C, relative to 25°.