Pressure Sensor. MPXH63000A Datasheet

MPXH63000A Sensor. Datasheet pdf. Equivalent

Part MPXH63000A
Description High Temperature Accuracy Integrated Silicon Pressure Sensor
Feature www.DataSheet4U.com Freescale Semiconductor Technical Data MPXH6300A Rev 4, 01/2007 High Temperat.
Manufacture Freescale Semiconductor
Datasheet
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MPXH63000A
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Technical Data
MPXH6300A
Rev 4, 01/2007
High Temperature Accuracy
Integrated Silicon Pressure Sensor
for Measuring Absolute Pressure,
On-Chip Signal Conditioned,
Temperature Compensated
and Calibrated
The Freescale MPXH6300A series sensor integrates on-chip, bipolar op amp
circuitry and thin film resistor networks to provide a high output signal and
temperature compensation. The small form factor and high reliability of on-chip
integration make the Freescale pressure sensor a logical and economical choice
for the system designer.
The MPXH6300A series piezoresistive transducer is a state-of-the-art,
monolithic, signal conditioned, silicon pressure sensor. This sensor combines
advanced micromachining techniques, thin film metallization, and bipolar
semiconductor processing to provide an accurate, high level analog output signal
that is proportional to applied pressure.
Figure 1 shows a block diagram of the internal circuitry integrated on a
pressure sensor chip.
Features
• Improved Accuracy at High Temperature
• Available in Small and Super Small Outline Packages
• 1.5% Maximum Error over 0° to 85°C
• Ideally suited for Microprocessor or Microcontroller-Based Systems
• Temperature Compensated from –40° to +125°C
• Durable Thermoplastic (PPS) Surface Mount Package
Application Examples
• Industrial Controls
• Engine Control/Manifold Absolute Pressure (MAP)
ORDERING INFORMATION
Device
Type
Options
Case
No.
MPX Series
Order No.
Packing
Options
Device
Marking
Basic
Absolute,
1317 MPXH63000A6U
Element Element Only
Rails MPXH6300A
Absolute,
1317 MPXH6300A6T1 Tape & Reel MPXH6300A
Element Only
Ported Absolute, Axial 1317A MPXH6300AC6U
Element Port
Rails MPXH6300A
Absolute, Axial 1317A MPXH300AC6T1 Tape & Reel MPXH6300A
Port
MPXH6300A
SERIES
INTEGRATED
PRESSURE SENSOR
20 to 304 kPa (3.0 to 42 psi)
0.3 to 4.9 V OUTPUT
SUPER SMALL OUTLINE PACKAGES
MPXH6300A6U/6T1
CASE 1317-04
MPXH6300AC6U/C6T1
CASE 1317A-03
PIN NUMBERS(1)
1 N/C 5 N/C
2 VS 6
3 GND 7
N/C
N/C
4 VOUT 8
N/C
1. Pins 1, 5, 6, 7, and 8 are internal device
connections. Do not connect to external
circuitry or ground. Pin 1 is noted by the
notch in the lead.
© Freescale Semiconductor, Inc., 2007. All rights reserved.



MPXH63000A
VS
Sensing
Element
Thin Film
Temperature
Compensation
and
Gain Stage #1
Gain Stage #2
and
Ground
Reference
Shift Circuitry
Vout
GND Pins 1, 5, 6, 7, and 8 are NO CONNECTS
for small outline package devices
Table 1. Maximum Ratings(1)
Figure 1. Fully Integrated Pressure Sensor Schematic
Rating
Symbol
Value
Maximum Pressure (P1 > P2)
PMAX
1200
Storage Temperature
TSTG
–40 to +125
Operating Temperature
Output Source Current @ Full Scale Output(2)
Output Sink Current @ Minimum Pressure Offset2
TA –40 to +125
Io+ 0.5
Io– –0.5
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
2. Maximum Output Current is controlled by effective impedance from Vout to GND or Vout to VS in the application circuit.
Unit
kPa
°C
°C
mAdc
mAdc
MPXH6300A
2
Sensors
Freescale Semiconductor







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