MPXM2010

www.DataSheet4U.com Freescale Semiconductor Technical Data MPXM2010 Rev 4, 09/2005 10 kPa On-Chip Temperature Compensated & Calibrated Silicon Pressure Sensors The MPXM2010 device is a silicon piezoresistive pressure sensor providing a highly accurate and linear voltage output – directly proportional to the applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin-film resistor network integrated on-chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation. Features Temperature Compensated Over 0°C to +85°C Available in Easy-to-Use Tape & Reel Ratiometric to Supply Voltage Gauge Ported & Non Ported Options MPXM2010 SERIES FREESCALE PREFERRED DEVICE 0 to 10 kPa (0 to 1.45 psi) 25 mV FULL SCALE SPAN (TYPICAL) Application Examples Respiratory Diagnostics Air Movement Control Controllers Pressure Switching Figure 1 shows a block diagram of the internal circuitry on the stand-alone pressure sensor chip. ORDERING INFORMATION Device Type/Order No. MPXM2010D MPXM2010DT1 MPXM2010GS MPXM2010GST1 Non-ported Non-ported, Tape and Reel Ported Ported, Tape and Reel Options Case No. 1320 1320 1320A 1320A 1 2 MPXM2010D/DT1 CASE 1320-02 MPXM2010GS/GST1 CASE 1320A-02 PIN NUMBERS GND +Vout 3 4 VS –Vout VS 3 Thin Film Temperature Compensation and Calibration Circuitry 1 GND Sensing Element 2 4 +Vout –Vout Figure 1. Fully Integrated Pressure Sensor Schematic © Freescale Semiconduc...