Pressure Sensors. MPXM2010 Datasheet

MPXM2010 Sensors. Datasheet pdf. Equivalent

Part MPXM2010
Description 10 kPa On-Chip Temperature Compensated & Calibrated Silicon Pressure Sensors
Feature www.DataSheet4U.com Freescale Semiconductor Technical Data MPXM2010 Rev 4, 09/2005 10 kPa On-Chip.
Manufacture Freescale Semiconductor
Datasheet
Download MPXM2010 Datasheet




MPXM2010
www.DFaretaeSshceeatl4eUS.ceommiconductor
Technical Data
10 kPa On-Chip Temperature
Compensated & Calibrated
Silicon Pressure Sensors
The MPXM2010 device is a silicon piezoresistive pressure sensor providing a
highly accurate and linear voltage output – directly proportional to the applied
pressure. The sensor is a single, monolithic silicon diaphragm with the strain
gauge and a thin-film resistor network integrated on-chip. The chip is laser
trimmed for precise span and offset calibration and temperature compensation.
Features
• Temperature Compensated Over 0°C to +85°C
• Available in Easy-to-Use Tape & Reel
• Ratiometric to Supply Voltage
• Gauge Ported & Non Ported Options
Application Examples
• Respiratory Diagnostics
• Air Movement Control
• Controllers
• Pressure Switching
Figure 1 shows a block diagram of the internal circuitry on the stand-alone
pressure sensor chip.
ORDERING INFORMATION
Device Type/Order No.
Options
MPXM2010D
Non-ported
MPXM2010DT1
Non-ported, Tape and Reel
MPXM2010GS
Ported
MPXM2010GST1
Ported, Tape and Reel
Case No.
1320
1320
1320A
1320A
MPXM2010
Rev 4, 09/2005
MPXM2010
SERIES
FREESCALE PREFERRED
DEVICE
0 to 10 kPa (0 to 1.45 psi)
25 mV FULL SCALE SPAN
(TYPICAL)
MPXM2010D/DT1
CASE 1320-02
MPXM2010GS/GST1
CASE 1320A-02
PIN NUMBERS
1 GND 3
VS
2 +Vout 4 –Vout
VS
3
Sensing
Element
1
Thin Film
Temperature
Compensation
and
Calibration
Circuitry
2 +Vout
4 –Vout
GND
Figure 1. Fully Integrated Pressure Sensor Schematic
© Freescale Semiconductor, Inc., 2005. All rights reserved.



MPXM2010
VOLTAGE OUTPUT VERSUS APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the sensor is directly
proportional to the differential pressure applied.
The output voltage of the differential or gauge sensor
increases with increasing pressure applied to the pressure
side relative to the vacuum side. Similarly, output voltage
increases as increasing vacuum is applied to the vacuum
side relative to the pressure side.
NOTE: Preferred devices are Freescale recommended
choices for future use and best overall value.
Table 1. Maximum Ratings(1)
Rating
Symbol
Value
Maximum Pressure
PMAX
75
Storage Temperature
TSTG
–40° to +125°
Operating Temperature
TA –40° to +125°
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
Unit
kPa
°C
°C
MPXM2010
2
Sensors
Freescale Semiconductor







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