Pressure Sensors. MPXM2102 Datasheet

MPXM2102 Sensors. Datasheet pdf. Equivalent

Part MPXM2102
Description 100 kPa On-Chip Temperature Compensated & Calibrated Silicon Pressure Sensors
Feature www.DataSheet4U.com Freescale Semiconductor Technical Data MPXM2102 Rev 4, 09/2005 100 kPa On-Chi.
Manufacture Freescale Semiconductor
Datasheet
Download MPXM2102 Datasheet




MPXM2102
www.DFaretaeSshceeatl4eUS.ceommiconductor
Technical Data
100 kPa On-Chip Temperature
Compensated & Calibrated
Silicon Pressure Sensors
The MPXM2102 device is a silicon piezoresistive pressure sensors providing
a highly accurate and linear voltage output - directly proportional to the applied
pressure. The sensor is a single, monolithic silicon diaphragm with the strain
gauge and a thin-film resistor network integrated on-chip. The chip is laser
trimmed for precise span and offset calibration and temperature compensation.
Features
• Temperature Compensated Over 0°C to +85°C
• Available in Easy-to-Use Tape & Reel
• Ratiometric to Supply Voltage
• Gauge Ported and Non Ported Options
Typical Applications
• Pump/Motor Controllers
• Robotics
• Level Indicators
• Medical Diagnostics
• Pressure Switching
• Barometers
• Altimeters
ORDERING INFORMATION
Device
Type
Options
Case
No.
MPX Series
Order No.
Packing
Options
Device
Marking
Non-
ported
Gauge
Gauge
1320 MPXM2102D
1320 MPXM2102DT1
Rails MPXM2102D
Tape & Reel MPXM2102D
Absolute
1320 MPXM2102A
Rails MPXM2102A
Absolute
1320 MPXM2102AT1 Tape & Reel MPXM2102A
Ported
Gauge, Axial 1320A MPXM2102GS
Port
Rails MPXM2102G
Gauge, Axial 1320A MPXM2102GST1 Tape & Reel MPXM2102G
Port
Absolute, Axial 1320A MPXM2102AS
Port
Rails MPXM2102A
Absolute, Axial 1320A MPXM2102AST1 Tape & Reel MPXM2102A
Port
MPXM2102
Rev 4, 09/2005
MPXM2102
SERIES
COMPENSATED AND CALIBRATED
PRESSURE SENSOR
0 TO 100 kPA (0 TO 14.5 psi)
40 mV FULL SCALE SPAN
(TYPICAL)
MPAK PACKAGES
MPXM2102D/A
CASE 1320-02
MPXM2102GS/AS
CASE 1320A-02
Pin Number
1 Gnd 3
VS
2 +Vout 4 -Vout
© Freescale Semiconductor, Inc., 2005. All rights reserved.



MPXM2102
Figure 1 shows a block diagram of the internal circuitry on the stand-alone pressure sensor chip.
VS
3
X-ducer
Sensing
Element
Thin Film
Temperature
Compensation
and
Calibration
Circuitry
2 Vout+
4 Vout-
1
GND
Figure 1. Temperature Compensated Pressure Sensor Schematic
VOLTAGE OUTPUT VERSUS
APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the sensor is directly
proportional to the differential pressure applied.
Table 1. Maximum Ratings(1)
The output voltage of the differential or gauge sensor
increases with increasing pressure applied to the pressure
side relative to the vacuum side. Similarly, output voltage
increases as increasing vacuum is applied to the vacuum
side relative to the pressure side.
Rating
Symbol
Value
Unit
Maximum Pressure
Pmax
200
Storage Temperature
Tstg -40 to +125
Operating Temperature
TA -40 to +125
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
kPa
°C
°C
MPXM2102
2
Sensors
Freescale Semiconductor







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