PRESSURE SENSORS. MPXV2010 Datasheet

MPXV2010 SENSORS. Datasheet pdf. Equivalent

Part MPXV2010
Description 10 KPA ON CHIP TEMPERATURE COMPENSATED CALIBRATED SILICON PRESSURE SENSORS
Feature MOTOROLA Freescale Semiconductor, Inc. SEMICONDUCTOR TECHNICAL DATA Order this document by MPX201.
Manufacture Motorola
Datasheet
Download MPXV2010 Datasheet




MPXV2010
MOTOROLA
Freescale Semiconductor, Inc.
SEMICONDUCTOR TECHNICAL DATA
Order this document
by MPX2010/D
10 kPa On-Chip Temperature
Compensated & Calibrated
Silicon Pressure Sensors
The MPX2010/MPXV2010G series silicon
piezoresistive pressure sensors provide a very
accurate and linear voltage output — directly
proportional to the applied pressure. These sensors
house a single monolithic silicon die with the strain
gauge and thin–film resistor network integrated on
each chip. The sensor is laser trimmed for precise
span, offset calibration and temperature
compensation.
www.DataSheet4U.com
Features
Temperature Compensated over 0°C to +85°C
Ratiometric to Supply Voltage
Differential and Gauge Options
Application Examples
Respiratory Diagnostics
Air Movement Control
Controllers
Pressure Switching
Figure 1 shows a block diagram of the internal
circuitry on the stand–alone pressure sensor chip.
VS
3
UNIBODY PACKAGE
MPX2010D
CASE 344
MPX2010GP
CASE 344B
MPX2010
MPXV2010G
SERIES
Motorola Preferred Device
COMPENSATED
PRESSURE SENSOR
0 to 10 kPa (0 to 1.45 psi)
FULL SCALE SPAN: 25 mV
SMALL OUTLINE PACKAGE
SURFACE MOUNT
MPXV2010GP
CASE 1369
SENSING
ELEMENT
THIN FILM
TEMPERATURE
COMPENSATION
AND
CALIBRATION
CIRCUITRY
2 Vout+
4 Vout-
1
GND
Figure 1. Temperature Compensated and Calibrated
Pressure Sensor Schematic
VOLTAGE OUTPUT versus
APPLIED DIFFERENTIAL PRESSURE
The output voltage of the differential or gauge sensor
increases with increasing pressure applied to the
pressure side (P1) relative to the vacuum side (P2).
Similarly, output voltage increases as increasing vacu-
um is applied to the vacuum side (P2) relative to the
pressure side (P1).
MPX2010DP
CASE 344C
MPX2010GS
CASE 344E
MPX2010GSX
CASE 344F
MPXV2010DP
CASE 1351
PIN NUMBER
1 Gnd 5 N/C
2 +Vout 6 N/C
3 VS 7 N/C
4 –Vout 8 N/C
NOTE: Pin 1 is noted by the notch in
the lead.
PIN NUMBER
Preferred devices are Motorola recommended choices for future use and
best overall value.
1
2
Gnd
+Vout
3 VS
4 –Vout
REV 9
NOTE: Pin 1 is noted by the notch in
the lead.
©
Motorola Sensor
Motorola, Inc. 2002
Device
Data
For More Information On This Product,
Go to: www.freescale.com
1



MPXV2010
MPX2010 MPXV2010G SERIFErSeescale Semiconductor, Inc.
MAXIMUM RATINGS(NOTE)
Rating
Symbol
Value
Maximum Pressure (P1 > P2)
Pmax
75
Storage Temperature
Tstg –40 to +125
Operating Temperature
TA –40 to +125
NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device.
Unit
kPa
°C
°C
OPERATING CHARACTERISTICS (VS = 10 Vdc, TA = 25°C unless otherwise noted, P1 > P2)
Characteristic
Symbol
Min
Typ
Max Unit
Pressure Range(1)
Supply Voltage(2)
POP
0
— 10 kPa
VS — 10 16 Vdc
Supply Current
Full Scale Span(3)
Offset(4)
Io
VFSS
Voff
24
–1.0
6.0
25
— mAdc
26 mV
1.0 mV
Sensitivity
V/P
2.5
— mV/kPa
Linearity(5)
Pressure Hysteresis(5) (0 to 10 kPa)
Temperature Hysteresis(5) (–40°C to +125°C)
Temperature Effect on Full Scale Span(5)
Temperature Effect on Offset(5)
TCVFSS
TCVoff
–1.0
–1.0
–1.0
±0.1
±0.5
1.0 %VFSS
— %VFSS
— %VFSS
1.0 %VFSS
1.0 mV
Input Impedance
Zin 1000 — 2550
Output Impedance
Response Time(6) (10% to 90%)
Zout 1400 — 3000
tR — 1.0 — ms
Warm–Up
— — 20 — ms
Offset Stability(7)
— — ±0.5 — %VFSS
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self–heating.
3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
4. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
5. Accuracy (error budget) consists of the following:
Linearity:
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
TcSpan:
Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
TcOffset:
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative
to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
2 For More Information On This Product, Motorola Sensor Device Data
Go to: www.freescale.com







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