DC SPUTTERING POWER SUPPLY
www.DataSheet4U.com
DC SPUTTERING POWER SUPPLY WITH ACTIVE ARC SUPPRESSION
DESCRIPTION
In the 1990s, CPI Canada pioneer...
Description
www.DataSheet4U.com
DC SPUTTERING POWER SUPPLY WITH ACTIVE ARC SUPPRESSION
DESCRIPTION
In the 1990s, CPI Canada pioneered reliability using Resonant Power Conversion Technology for high power processing. This method offers unique advantages in sputtering systems in the areas of wide load range, reliability (using an inherently shortcircuit proof, rugged power chain), and wide control range (from < 1% to full power). With proven reliability, CPI has continued to evolve this technology into higher powers with 36 kW available in an 8.75” high chassis. When it comes to Watts/inch3 (size), Watts/lbs (weight), Watts/$ (price), and proven field reliability, CPI is unmatched in the industry.
CPW2870B15 36kW – 440/460/480VAC
SPECIFICATIONS
Input power requirements: 396V - 528VAC at 61 amps max 50/60Hz, 4 wire 3 phase + gnd > 90% 36kW Monitors o/p voltage, power and current Cooling: Forced air: T ambient = 35°C max. at full power Weight: approx. 115 lbs User Interface: Digital Interface: Remote Analog Sensing RS-232, 422, 485 Remote control via digital ports Input/ Output Power terminals for easy installation. Dimensions: 8.72” H x 26.2” DP - 19” rack mount Interlocks for safe operation
Efficiency: Output power: Front panel Digital Meter:
Protection: Over temperature Over-current, over-voltage, over-power Input under voltage
Ignition voltage: Output voltage: Output Current:
1000V 575V max 120A max
www.DataSheet4U.com
PRODUCT ADVANTAGES
Delivery time: Typically 4 to 6 weeks for...
Similar Datasheet