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Freescale Semiconductor Technical Data
MP3V5050V Rev 1, 10/2008
High Temperature Accuracy Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated
The MP3V5050V sensor integrates on-chip, bipolar op amp circuitry and thin film resistor networks to provide a high output signal and temperature compensation. The small form factor and high reliability of on-chip integration make the Freescale Semiconductor, Inc. pressure sensor a logical and economical choice for the system designer. The MP3V5050V piezoresistive transducer is a state-of-the-art, monolithic, signal conditioned, silicon pressure sensor. This sensor combines advanced micromachining techniques, thin film metallization, and bipolar semiconductor processing to provide an accurate, high level analog output signal that is proportional to applied pressure. Figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip. Features • 2.5% Maximum Error over 0° to 85°C • Ideally suited for Microprocessor or Microcontroller-Based Systems • Temperature Compensated from Over –40° to +125°C • Patented Silicon Shear Stress Strain Gauge • Durable Thermoplastic (PPS) Surface Mount Package • Easy-to-Use Chip Carrier Option • Ideal for Automotive and Non-Automotive Applications Typical Applications • Vacuum Pump Monitoring ORDERING INFORMATION
Device Type Options Case No. 482A 482A MPX Series Order No. MP3V5050VC6T1 MP3V5050VC6U Packing Options Device Marking
MP3V5050V Series
INTEGRATED PRESSURE SENSOR –50 to 0 kPa (–7.25 to 0 psi) 0.12 to 2.8 Volts Output SMALL OUTLINE PACKAGE
MP3V5050VC6T1 CASE 482A-01
PIN NUMBER(1)
1 2 3 4 N/C VS GND VOUT 5 6 7 8 N/C N/C N/C N/C
Ported Vacuum, Element Axial Port Ported Vaccum, Element Axial Port
Tape & Reel MP3V5050V Rail MP3V5050V
1. Pins 1, 5, 6, 7, and 8 are internal device connections. Do not connect to external circuitry or ground. Pin 1 is noted by the notch in the lead.
VS
Sensing Element
Thin Film Temperature Compensation and Gain Stage #1
Gain Stage #2 and Ground Reference Shift Circuitry
Vout
GND
Pins 1, 5, 6, 7, and 8 are NO CONNECTS
MP3V5050V Sensors Freescale Semiconductor 1
Figure 1. Fully Integrated Pressure Sensor Schematic
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Table 1. Maximum Ratings(1)
Rating Maximum Pressure (P1 > P2) Storage Temperature Operating Temperature Symbol Pmax Tstg TA Value 200 –40° to +125° –40° to +125° Units kPa °C °C
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
Table 2. Operating Characteristics (VS = 3.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2.)
Characteristic Pressure Range Supply Voltage(1) Supply Current Full Scale Output(2) @ VS = 3.0 Volts Full Scale Span(3) @ VS = 3.0 Volts Accuracy(4) Sensitivity Response Time(5) Warm-Up Time(6) Offset Stability(7) Pressure Offset(8) (0 to 85°C) (0 to 85°C) (Pdiff = 0 kPa) (0 to 85°C) Symbol POP VS Io VFSO Min –50 2.7 — 2.7 Typ — 3.0 7.0 2.