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XLF-100 Dataheets PDF



Part Number XLF-100
Manufacturers SMC
Logo SMC
Description XLF/XLFV Series High Vacuum Angle Valve
Datasheet XLF-100 DatasheetXLF-100 Datasheet (PDF)

Aluminum High Vacuum Angle Valve Series XLA/XLAV Dimensions XLA/Air operated E (b) C D øFn (KF flange) (a) E Heater (Option) (c) Auto switch (Option) øFd (K flange) C B øG A (mm) Model A A 40 50 65 70 88 90 B 103 113 158 170 196 235 C 38 48 66 79 100 117 D 1 1 2 2 3 3 E Note 1) — 12 11 11 11 11 Fn 30 40 55 75 87 114 Fd — — — — 95 110 H G 17 26 41 52 70 83 H 40 39 63 68 69 96 XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 Note 1) Dimension E applies when heater option is inclu.

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Aluminum High Vacuum Angle Valve Series XLA/XLAV Dimensions XLA/Air operated E (b) C D øFn (KF flange) (a) E Heater (Option) (c) Auto switch (Option) øFd (K flange) C B øG A (mm) Model A A 40 50 65 70 88 90 B 103 113 158 170 196 235 C 38 48 66 79 100 117 D 1 1 2 2 3 3 E Note 1) — 12 11 11 11 11 Fn 30 40 55 75 87 114 Fd — — — — 95 110 H G 17 26 41 52 70 83 H 40 39 63 68 69 96 XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 Note 1) Dimension E applies when heater option is included. (Lead wire length: approx. 1 m) Note 2) (a), (b) and (c) in the above drawing indicate heater mounting positions. Moreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under “Replacement Heaters” on the back of page 9. XLAV/With solenoid valve J Port P (Pressure port) N M Port R (Exhaust port) P K L R (mm) Model (mm) Model J 35.5 40.5 50.5 K 13.4 14.9 22.7 L 8.5 8.5 8.5 M 2.7 2.7 2.7 N 3 3 3 J 57 78.5 87 K 25.7 28.7 38.7 L 8.5 12 12 M 2.7 4 4 N 3 2 2 XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 ∗ Other dimensions are the same as the XLA. ∗ Other dimensions are the same as the XLA. Note) For further details on solenoid valves, refer to the SMC solenoid valve catalog “SYJ300/500/700” (ES11-86). 4 Free Datasheet http://www.datasheet4u.com/ Aluminum High Vacuum Angle Valve Series XLC/XLCV Dimensions XLC/Air operated E (b) C D øFn (KF flange) (a) E (c) Heater (Option) Auto switch (Option) øFd (K flange) C B A (mm) Model A A 40 50 65 70 88 90 B 110 121 171 183 209 250 C 38 48 66 79 100 117 D 1 1 2 2 3 3 E Note 1) — 12 11 11 11 11 Fn 30 40 55 75 87 114 øG Fd — — — — 95 110 G 17 26 41 52 70 83 H H 40 39 63 68 69 96 J J 26 28 36 38 45 56 XLC-16 XLC-25 XLC-40 XLC-50 XLC-63 XLC-80 Note 1) Dimension E applies when heater option is included. (Lead wire length: approx. 1 m) Note 2) (a), (b) and (c) in the above drawing indicate heater mounting positions. Moreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under “Replacement Heaters” on the back of page 9. XLCV/With solenoid valve R P Port R (Exhaust port) N In case of double solenoid valve R2 P Port P (Pressure port) In case of single solenoid valve M L K (mm) Model Q R1 (mm) Model K 14.3 15.8 29 L 9.2 9.2 9.2 M 6.4 6.4 6.4 N 3.5 3.5 3.5 P 2.7 2.7 2.7 Q 17.3 15.8 2.6 R 36 41 51 K 32.3 32 43.7 L 9.2 11 11 M 6.4 11 11 N 3.5 6.5 6.5 P 2.7 6.5 6.5 Q — — — R 57.5 79 87.5 XLCV-16 XLCV-25 XLCV-40 XLCV-50 XLCV-63 XLCV-80 ∗ Other dimensions are the same as the XLC. ∗ Other dimensions are the same as the XLC. Note) For further details on solenoid valves, refer to the SMC solenoid valve catalog “SYJ3000/5000/7000” (ES11-84). 8 Free Datasheet http://www.datasheet4u.com/ Aluminum High Vacuum Angle Valve Series XLF/XLFV Dimensions XLF/Air operated (b) C E D øFn (KF flange) (a) E (c) Heater (Option) Auto switch (Option) øFd (K flange) C A (mm) Model A B øG A 40 50 65 70 88 90 108 138 B 103 113 158 170 196 235 300 315 C 38 48 66 79 100 117 154 200 D 1 1 2 2 3 3 3 3 H E Note 1) — 12 11 11 11 11 11 11 Fn 30 40 55 75 87 114 134 190 Fd — — — — 95 110 130 180 G 17 26 41 52 70 83 102 153 H 40 39 63 68 69 96 131 112 XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 XLF-100 XLF-160 Note 1) Dimension E applies when heater option is included. (Lead wire length: approx. 1 m) Note 2) (a), (b) and (c) in the above drawing indicate heater mounting positions. Moreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under “Replacement Heaters” on the back of page 9. XLFV/With solenoid valve J M Port P (Pressure port) N K (mm) R P L Model J 35.5 40.5 50.5 67 78.5 87 105.5 128.5 K 13.4 15 22.7 21.7 28.7 38.7 49.7 58 L 8.5 8.5 8.5 12 12 12 12 12 M 3 3 3 4 4 4 4 4 N 2.7 2.7 2.7 2 2 2 2 2 Port R (Exhaust port) XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 XLFV-100 XLFV-160 ∗ Other dimensions are the same as the XLF. Note) For further details on solenoid valves, refer to the SMC solenoid valve catalog “SYJ300/500/700” (ES11-86). 12 Free Datasheet http://www.datasheet4u.com/ Aluminum High Vacuum Angle Valve Series XLG/XLGV Dimensions XLG/Air operated E (b) C D øFn (KF flange) (a) E Heater (Option) (c) Auto switch (Option) øFd (K flange) C B A (mm) Model A A 40 50 65 70 88 90 B 110 121 171 183 209 250 C 38 48 66 79 100 117 D 1 1 2 2 3 3 E Note 1) — 12 11 11 11 11 øG Fn 30 40 55 75 87 114 Fd — — — — 95 110 H G 17 26 41 52 70 83 J H 40 39 63 68 69 96 J 26 28 36 38 45 56 XLG-16 XLG-25 XLG-40 XLG-50 XLG-63 XLG-80 XLGV/With solenoid valve Note 1) Dimension E applies when heater option is included. (Lead wire length: approx. 1 m) Note 2) (a), (b) and (c) in the above drawing indicate heater mounting positions. Moreover, heater mounting position.


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