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Aluminum High Vacuum Angle Valve
Series XLA/XLAV
Dimensions
XLA/Air operated
E
(b)
C
D
øFn (KF flange)
(a)
E
Heater (Option) (c) Auto switch (Option)
øFd (K flange)
C
B
øG
A
(mm) Model
A
A
40 50 65 70 88 90
B
103 113 158 170 196 235
C
38 48 66 79 100 117
D
1 1 2 2 3 3
E Note 1)
— 12 11 11 11 11
Fn
30 40 55 75 87 114
Fd
— — — — 95 110
H G
17 26 41 52 70 83
H
40 39 63 68 69 96
XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80
Note 1) Dimension E applies when heater option is included. (Lead wire length: approx. 1 m) Note 2) (a), (b) and (c) in the above drawing indicate heater mounting positions. Moreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under “Replacement Heaters” on the back of page 9.
XLAV/With solenoid valve
J
Port P (Pressure port)
N
M
Port R (Exhaust port)
P
K
L
R
(mm) Model
(mm) Model
J
35.5 40.5 50.5
K
13.4 14.9 22.7
L
8.5 8.5 8.5
M
2.7 2.7 2.7
N
3 3 3
J
57 78.5 87
K
25.7 28.7 38.7
L
8.5 12 12
M
2.7 4 4
N
3 2 2
XLAV-16 XLAV-25 XLAV-40
XLAV-50 XLAV-63 XLAV-80
∗ Other dimensions are the same as the XLA. ∗ Other dimensions are the same as the XLA. Note) For further details on solenoid valves, refer to the SMC solenoid valve catalog “SYJ300/500/700” (ES11-86).
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Free Datasheet http://www.datasheet4u.com/
Aluminum High Vacuum Angle Valve
Series XLC/XLCV
Dimensions
XLC/Air operated
E
(b)
C
D
øFn (KF flange)
(a)
E
(c)
Heater (Option) Auto switch (Option)
øFd (K flange)
C
B
A
(mm) Model
A
A
40 50 65 70 88 90
B
110 121 171 183 209 250
C
38 48 66 79 100 117
D
1 1 2 2 3 3
E Note 1)
— 12 11 11 11 11
Fn
30 40 55 75 87 114
øG
Fd
— — — — 95 110
G
17 26 41 52 70 83
H H
40 39 63 68 69 96
J
J
26 28 36 38 45 56
XLC-16 XLC-25 XLC-40 XLC-50 XLC-63 XLC-80
Note 1) Dimension E applies when heater option is included. (Lead wire length: approx. 1 m) Note 2) (a), (b) and (c) in the above drawing indicate heater mounting positions. Moreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under “Replacement Heaters” on the back of page 9.
XLCV/With solenoid valve
R
P
Port R (Exhaust port)
N
In case of double solenoid valve
R2
P
Port P (Pressure port)
In case of single solenoid valve
M
L K
(mm) Model
Q
R1
(mm) Model
K
14.3 15.8 29
L
9.2 9.2 9.2
M
6.4 6.4 6.4
N
3.5 3.5 3.5
P
2.7 2.7 2.7
Q
17.3 15.8 2.6
R
36 41 51
K
32.3 32 43.7
L
9.2 11 11
M
6.4 11 11
N
3.5 6.5 6.5
P
2.7 6.5 6.5
Q
— — —
R
57.5 79 87.5
XLCV-16 XLCV-25 XLCV-40
XLCV-50 XLCV-63 XLCV-80
∗ Other dimensions are the same as the XLC. ∗ Other dimensions are the same as the XLC. Note) For further details on solenoid valves, refer to the SMC solenoid valve catalog “SYJ3000/5000/7000” (ES11-84).
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Free Datasheet http://www.datasheet4u.com/
Aluminum High Vacuum Angle Valve
Series XLF/XLFV
Dimensions
XLF/Air operated
(b)
C E
D
øFn (KF flange)
(a)
E
(c)
Heater (Option) Auto switch (Option)
øFd (K flange)
C
A
(mm) Model
A
B
øG
A
40 50 65 70 88 90 108 138
B
103 113 158 170 196 235 300 315
C
38 48 66 79 100 117 154 200
D
1 1 2 2 3 3 3 3
H E Note 1)
— 12 11 11 11 11 11 11
Fn
30 40 55 75 87 114 134 190
Fd
— — — — 95 110 130 180
G
17 26 41 52 70 83 102 153
H
40 39 63 68 69 96 131 112
XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 XLF-100 XLF-160
Note 1) Dimension E applies when heater option is included. (Lead wire length: approx. 1 m) Note 2) (a), (b) and (c) in the above drawing indicate heater mounting positions. Moreover, heater mounting positions will differ depending on the type of heater. For further details, refer to mounting positions under “Replacement Heaters” on the back of page 9.
XLFV/With solenoid valve
J
M
Port P (Pressure port)
N
K
(mm)
R
P
L
Model
J
35.5 40.5 50.5 67 78.5 87 105.5 128.5
K
13.4 15 22.7 21.7 28.7 38.7 49.7 58
L
8.5 8.5 8.5 12 12 12 12 12
M
3 3 3 4 4 4 4 4
N
2.7 2.7 2.7 2 2 2 2 2
Port R (Exhaust port)
XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 XLFV-100 XLFV-160
∗ Other dimensions are the same as the XLF. Note) For further details on solenoid valves, refer to the SMC solenoid valve catalog “SYJ300/500/700” (ES11-86).
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Free Datasheet http://www.datasheet4u.com/
Aluminum High Vacuum Angle Valve
Series XLG/XLGV
Dimensions
XLG/Air operated
E
(b)
C
D
øFn (KF flange)
(a)
E
Heater (Option) (c) Auto switch (Option)
øFd (K flange)
C
B
A
(mm) Model
A
A
40 50 65 70 88 90
B
110 121 171 183 209 250
C
38 48 66 79 100 117
D
1 1 2 2 3 3
E Note 1)
— 12 11 11 11 11
øG
Fn
30 40 55 75 87 114
Fd
— — — — 95 110
H G
17 26 41 52 70 83
J
H
40 39 63 68 69 96
J
26 28 36 38 45 56
XLG-16 XLG-25 XLG-40 XLG-50 XLG-63 XLG-80
XLGV/With solenoid valve
Note 1) Dimension E applies when heater option is included. (Lead wire length: approx. 1 m) Note 2) (a), (b) and (c) in the above drawing indicate heater mounting positions. Moreover, heater mounting position.