Document
Freescale Semiconductor
Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated
The MPX5700 series piezoresistive transducer is a state-of-the-art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs. This patented, single element transducer combines advanced micromachining techniques, thin-film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure.
Features • 2.5% Maximum Error over 0° to 85°C • Ideally Suited for Microprocessor or Microcontroller-Based Systems • Available in Absolute, Differential and Gauge Configurations • Patented Silicon Shear Stress Strain Gauge • Durable Epoxy Unibody Element
Pressure
MPX5700 Rev 9, 09/2009
MPX5700 Series
0 to 700 kPa (0 to 101.5 psi) 15 to 700 kPa (2.18 to 101.5 psi)
0.2 to 4.7 V Output
Device Name
Case No.
Unibody Package (MPX5700 Series)
MPX5700A MPX5700AP MPX5700AS
867 867B 867E
MPX5700ASX MPX5700D MPX5700DP MPX5700GP MPX5700GP1 MPX5700GS
867F 867 867C 867B 867B 867E
None
ORDERING INFORMATION
# of Ports
Single
Dual
Gauge
Pressure Type Differential Absolute
Device Name
• • MPX5700A
• • MPX5700AP
• • MPX5700A
• • MPX5700A
• • MPX5700D
• • MPX5700DP
••
MPX5700GP
••
MPX5700GP
••
MPX5700D
UNIBODY PACKAGES
MPX5700A/D CASE 867-08
MPX5700AP/GP/GP1 CASE 867B-04
MPX5700DP CASE 867C-05
MPX5700AS/GS CASE 867E-03
MPX5700ASX CASE 867F-03
© Freescale Semiconductor, Inc., 2007-2009. All rights reserved.
Pressure
Operating Characteristics
Table 1. Operating Characteristics (VS = 5.0 Vdc, TA = 25°C unless otherwise noted, P1 > P2. Decoupling circuit shown in required to meet electrical specifications.)
Pressure Range(1)
Supply Voltage(2) Supply Current Zero Pressure Offset(3)
Full Scale Output(4) Full Scale Span(5) Accuracy(6)
Characteristic
Symbol
Gauge, Differential: MPX5700D Absolute: MPX5700A
POP
Gauge, Differential (0 to 85°C) Absolute (0 to 85°C)
VS IO Voff
(0 to 85°C) (0 to 85°C) (0 to 85°C)
VFSO VFSS
—
Sensitivity Response Time(7)
Output Source Current at Full Scale Output Warm-Up Time(8)
V/P tR IO+ —
Min 0 15
4.75 — 0.088 0.184 4.587 — — — — — —
Typ — — 5.0 7.0 0.2 — 4.7 4.5 — 6.4 1.0 0.1 20
Max 700 700 5.25 10 0.313 0.409 4.813 — ±2.5 — — — —
Unit kPa
Vdc mAdc Vdc
Vdc Vdc %VFSS mV/kPa ms mAdc ms
1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. 3. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 4. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure. 5. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure. 6. Accuracy (error budget) consists of the following:
Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25°C. TcSpan: Output deviation over the temperature range of 0° to 85°C, relative to 25°C. TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0° to 85°C, relative to 25°C. Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS, at 25°C. 7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 8. Warm-up Time is defined as the time required for the device to meet the specified output voltage after the pressure has been stabilized.
MPX5700 2
Sensors Freescale Semiconductor
Maximum Ratings
Pressure
Table 2. Maximum Ratings(1)
Parametrics Maximum Pressure(2) (P2 ≤ 1 Atmosphere) Storage Temperature Operating Temperature
Symbol P1max Tstg TA
Value 2800 -40 to +125 -40 to +125
Unit kPa °C °C
1. Maximum Ratings apply to Case 867 only. Extended exposure at the specified limits may cause permanent damage or degradation to the device.
2. This sensor is designed for applications where P1 is always greater than, or equal to P2. P2 maximum is 500 kPa.
Figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip.
VS 3
Sensing Element
Thin Film Temperature Compensation
and Gain Stage #1
Gain Stage #2 and
Ground Reference Shift Circuitry
1 Vout
2 Pins 4, 5, and 6 are no connects GND
Figure 1. Fully Integrated Pressure Sensor Schematic
Sen.