Document
MEMS Mass Flow Sensor
D6F-03A3-000
Compact, sensors featuring MEMS technology for precision mass airflow measurement
• Precision unidirectional mass airflow up to 3 LPM • Stable output across full scale • Ultra-compact size 36.6 (L) x 8 (W) x 16.8 (H) mm • Low power consumption
Application Examples
• Pick and place systems • Industrial processes • Leak detection • Spectroscopy • Mass flow controllers • Scientific / test equipment • Environmental comfort controls • Fuel cell controls
Ordering Information
Model D6F-03A3-000 D6F-Cable2
Case Thermoplastic resin / Aluminum alloy
*Dry gas must not contain large particles, e.g., dust, oil, mist.
■ Rating
Absolute maximum rating
Item Power-supply voltage Output voltage
VCC VOUT
Term
Applicable Gas Air*
Flow Range 0 – 3 LPM
Ratings 26.4 6
VDC VDC
Unit
MEMS Mass Flow Sensor D6F-03A3-000
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■ Electrical Performance
Recommended operation condition and DC characteristic
Item Power-supply voltage Operating temperature Maximum output voltage Minimum output voltage
VCC TOPR VOH VOL
Term
Condition — — Load resistance 10kΩ Load resistance 10kΩ
MIN 10.8 0 5 0
TYP — — — —
MAX 26.4 50 5.7 1
Unit VDC °C VDC VDC
■ Basic Performance
0 to 3L/min. (Normal) volumetric flow rate at 0° C, 101.3kPa. Measurement condition: Power-supply voltage 12 ±0.1VDC, ambient temperature 25 ±5° C and ambient air humidity 25 to 75% RH.
D6F-03A3-000
Flow Rate L/min (normal) Output Voltage (VDC)
0 1.00 ±0.2
0.6 2.83 ±0.2
1.2 3.77 ±0.2
1.8 4.34 ±0.2
2.4 4.72 ±0.2
3.0 5.00 ±0.2
■ Characteristics
Degree of Protection Applicable Gas Electrical Connection Output Signal Current Consumption Repeat Accuracy Insulation Resistance Dielectric Strength Withstand Pressure Operating Temperature Operating Humidity Storage Temperature Storage Humidity Weight
IP40 Air Connector (3 wire) Analog, 1-5VDC (load resistance 10kΩ min) Max 15mA (no load, VCC = 12 to 24VDC, VSS = GND = 0V, 25° C) ±5% FSD max, 25° C 20Mohm min. (500VDC between lead terminals and case) 500VAC, 50/60Hz for 1 minute (leakage current typ. <1mA) between lead terminals and case 200 kPa 0 to 50° C (with no ice or dew condensation) 85%RH max. (with no ice or dew condensation) -10 to 60° C (with no ice or dew condensation) 85%RH max. (with no ice or dew condensation) 5.27g
■ Precautions
1. Avoid use in excessively dirty, wet environments 2. Do not use in the presence of flammable gases (e.g. hydrogen,
methane, ethane) and liquefied petroleum gas. In addition, do not use with corrosive gases (e.g. chlorine, sulphur, acids, alkalis, etc.). 3. Install in the direction of the arrow indicated. 4. For best results (optimum accuracy), mount horizontally. 5. Use four suitable M3 screws for mounting. Do not exceed a fixing torque of 0.59 Nm. 6. Do not modify D6F- in any way. 7. Do not place any object in or close to the inlet and outlet orifices. 8. Do not use the sensor in any of the following environments: • a location that receives radiant heat from the sun or apparatus
• a place where intense light may radiate down
• where fast changing temperatures occur
• locations prone to freezing, high humidity, condensation
• places where large magnitudes of vibration or shock could occur
9. Noise countermeasures: VERY IMPORTANT: Take suitable precautions to minimize the effects and potential for induced electrical noise. Install away from apparatus that generates strong high frequencies, surges and spikes. Take particular care to install away from AC power transformers, live mains power lines and high power magnetic circuits. Attach a surge suppressor and a noise filter to the peripheral equipment.
10.Ensure good grounding is achieved by grounding the GND terminal to the peripheral equipment’s main ground frame connection and its associated regulated power supply.
11.Do not make a direct solder connection to the integral terminals. It is recommended you use the optional cable ‘D6F-CABLE2’ for attachment and to ensure correct connection.
12.D6F- is a precision component. Keep in original packaging and remove only when ready for installation. Damage may occur if subjected to excessive force (e.g. dropped or kicked). Any item suspected to be damaged should be discarded.
13.Immediately following installation, a qualified person should perform checks to ensure safe, satisfactory operation.
2 MEMS Mass Flow Sensor D6F-03A3-000
Dimensions
All dimensions are shown in millimeters.
■ D6F-Cable2 (Optional)
200±3.5
Black Brown
100±1.5
Blue
1. VCC 2. VOUT 3. GND
MEMS Mass Flow Sensor D6F-03A3-000
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Terms and Conditions of Sale
1. Offer; Acceptance. These terms and conditions (these "Terms") are deemed part of all quotations, acknowledgments, invoices, purchase orders and other documents, whether electronic or in writing, relating to the sale of products or services (collectively, the "Products") by Omron Electronic Components LLC ("Seller"). Seller hereby objects to any terms or conditions proposed in Buyer's purchase order or other .