MS7930

MS7930 PRESSURE SENSOR DIE (0-30 BAR) 0 to 3000 kPa range (30 bar or 435 PSI) Absolute/differential pressure sensors High linearity, small size RoHS-compatible & Pb-free1 DESCRIPTION The sensor element of the MS7930 consists of a silicon micro-machined membrane. Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This sensor, which has outstanding linearity and span values, is available in various configurations. The absolute pressure sensor employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer used for this sealing has a thickness of 0.2 mm (MS7930-A_0.2) or 0.5 mm (MS7930-A_0.5). There are two gauge versions available: one with a drilled Pyrex glass (MS7930-D) and the other without Pyrex glass (MS7930-S). FEATURES Uncompensated pressure sensor die Output span 150mV @ 5V Temperature range -40°…+125°C Linearity 0.05% (typical) Very small die size 1.72 x 1.58 mm (MS7930-A) Low cost, high reliability APPLICATION Absolute pressure sensor systems Differential/gauge pressure sensor systems Engine controls Dive computers ELECTRICAL CONNECTIONS Positive output for pressure applied topside Vs+ EPI Out+ Out- Vs+ : Supply voltage of Wheatstone bridge Epi : Connection of epitaxial layer (membrane) Out- : Negative output Out+ : Positive output GND1 : Ground GND2 : Ground GND1 GND2 1 The European RoHS directive 2002/95/EC (Restrict...