Integrated Silicon Pressure Sensor
Freescale Semiconductor Technical Data
Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compe...
Description
Freescale Semiconductor Technical Data
Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated, and Calibrated
The MPX5100 series piezoresistive transducer is a state-of-the-art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs. This patented, single element transducer combines advanced micromachining techniques, thin-film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure.
Features
2.5% Maximum Error over 0° to 85°C Ideally suited for Microprocessor or Microcontroller-Based Systems Patented Silicon Shear Stress Strain Gauge Available in Absolute, Differential and Gauge Configurations Durable Epoxy Unibody Element Easy-to-Use Chip Carrier Option
Typical Applications
Patient Monitoring Process Control Pump/Motor Control Pressure wSitching
ORDERING INFORMATION
Device Type
Options
Case No.
MPX Series Order Number
Device Marking
UNIBODY PACKAGE (MPX5100 SERIES)
Basic
Absolute
Elements Differential
867 867
Ported Differential Dual Ports Elements Absolute, Single Port
867C 867B
Gauge, Single Port
867B
MPX5100A MPX5100D MPX5100DP MPX5100AP MPX5100GP
MPX5100A MPX5100D MPX5100DP MPX5100AP MPX5100GP
Gauge, Axial PC Mount Gauge, Axial Port, SMT Gauge, Axial Port, DIP
867F 482A 482C
MPX5100GSX MPXV5100GC6U MPX5V100GC7U...
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