AWM92200V

AWM90000 Series Mass flow sensor for gases FEATURES · Ranges 0...±200 sccm1 or 0...±2 "H2O (0...±5 mbar) · Bidirectional sensing · Actual mass flow sensing · Low differential pressure sensing SERVICE To be used with dry gases only The AWM series is NOT designed for liquid flow and will be damaged by liquid flow through the sensor SPECIFICATIONS Maximum ratings Supply voltage2 Power consumption Temperature limits Operating Storage Mechanical shock ELECTRICAL CONNECTION 8 to 15 V typ. 10 ±0.01 V 50 mW -25 to 85°C -40 to 90°C 100 g (5 drops, 6 axes) Note: 1 sccm denotes standard cubic centimeters per minute 2 Output voltage is ratiometric to supply voltage 12345678 December 2007 / 592 1/6 www.sensortechnics.com AWM90000 Series Mass flow sensor for gases FLOW SENSOR CHARACTERISTICS3 VS = 10 ±0.01 V, TA = 25°C Part no. Flow range (full scale) Pressure range AWM92100V AWM92200V ±200 sccm ±2 "H2O Max. flow change4 5.0 l/sec 5.0 l/sec Output voltage @ trim point 77 mV @ 200 sccm 38 mV @ 2 "H2O PERFORMANCE CHARACTERISTICS VS = 10 ±0.01 V, TA = 25°C Characteristics Zero offset Repeatability and hysteresis (combined) Ratiometricity error2 Temperature effects5 Offset Span -25 to 85 °C6 -25 to 25 °C 25 to 85 °C Sensor resistance (pin 1 - pin 2, pin 1 - pin 8) Sensor current Response time Common mode pressure AWM92100V AWM92200V AWM92100V AWM92200V AWM92100V AWM92200V Min. -15 1.5 Typ. 0 ±0.1 ±0.30 ±2.07 -3.08 255 ±1.08 -305 1.75 1.0 Max. 15 ±0.35 Unit mV %FSO ...