Document
MEMS Airflow Sensor
D6F-10A, -20A, -50A
Compact, intelligent sensor featuring MEMS technology for precision mass airflow measurement
• Precision mass airflow up to 50 slpm • Stable output across full scale • Horizontal mounting feature with *NBR ‘O’ ring option • Compact size 78 (L) x 30 (W) x 30 (H) mm • Low power consumption
* NBR material recommended for all applications including medical and food processing
Application Examples
• Industrial processes • Medical Respirators and Ventilators • MiG and TiG welding systems • Anesthesia Delivery • Mass flow controllers • Scientific / test equipment • Fuel cell controls
Ordering Information
Model D6F-10A5 D6F-20A5 D6F-50A5 D6F-10A6 D6F-20A6 D6F-50A6 D6F-Cable1
Case Thermoplastic resin / Aluminum alloy Thermoplastic resin / Aluminum alloy Thermoplastic resin / Aluminum alloy Thermoplastic resin / Aluminum alloy Thermoplastic resin / Aluminum alloy Thermoplastic resin / Aluminum alloy
Applicable Gas Air, N2O, O2 Air, N2O, O2 Air, N2O, O2 Air, N2O, O2 Air, N2O, O2 Air, N2O, O2
■ Rating
Absolute maximum rating
Item Power-supply voltage Output voltage
VCC VOUT
Term
26.4 6
Flow Range 0 – 10 LPM 0 – 20 LPM 0 – 50 LPM 0 – 10 LPM 0 – 20 LPM 0 – 50 LPM
Ratings
Notes Built-in orifice, Right-angle Connect Built-in orifice, Right-angle Connect Built-in orifice, Right-angle Connect Built-in orifice, Straight Connect Built-in orifice, Straight Connect Built-in orifice, Straight Connect Optional (recommended)
VDC VDC
Unit
MEMS Airflow Sensor D6F-10A, -20A, -50A
1
■ Electrical Performance
Recommended operation condition and DC characteristic
Item Power-supply voltage Operating temperature Maximum output voltage
Minimum output voltage
VCC TOPR VOH
Term
VOL
Condition
—
—
VCC = 12VDC to 24VDC IOH = 0.5mA VCC = 12VDC to 24VDC IOL = -0.5mA
MIN 10.8 -10 5
0
TYP — — —
—
MAX 26.4 60 5.7
Unit VDC °C VDC
1 VDC
■ Basic Performance
0 to 50 min. (Normal). L/min (Normal) volumetric flow rate at 0° C, 101 3kPa. Measurement condition: Power-supply voltage 12 ±0.1VDC, ambient temperature 25 ±2° C and ambient air humidity 25 to 75% RH.
D6F-10A
Flow Rate L/min (normal) Output Voltage (VDC)
D6F-20A
0 1.00 ±0.12
2 1.75 ±0.12
4 2.60 ±0.12
6 3.45 ±0.12
8 4.25 ±0.12
10 5.00 ±0.12
Flow Rate L/min (normal) Output Voltage (VDC)
0 1.00 ±0.12
4 1.93 ±0.12
8 2.87 ±0.12
12 3.70 ±0.12
16 4.41 ±0.12
20 5.00 ±0.12
D6F-50A
Flow Rate L/min (normal) Output Voltage (VDC)
0 1.00 ±0.12
10 2.45 ±0.12
20 3.51 ±0.12
30 4.20 ±0.12
40 4.66 ±0.12
50 5.00 ±0.12
■ Characteristics
Degree of Protection Applicable Gas Electrical Connection Output Signal Current Consumption Repeat Accuracy Insulation Resistance Dielectric Strength Withstand Pressure Operating Temperature Operating Humidity Storage Temperature Storage Humidity Weight
IP40 Air Connector (3 wire) Analog, 1-5VDC (load resistance 10kohm min) Max 15mA (no load, VCC = 12 to 24 VDC, VSS = GND = 0V, 25° C) +/- 3% FSD max, 25° C 20Mohm min. (500VDC between lead terminals and case) 500VAC, 50/60Hz for 1 minute (leakage current typ. <1mA) between lead terminals 500 kPa -10 to +60° C (with no ice or dew condensation) 85%RH max. (with no ice or dew condensation) -40 to +80° C (with no ice or dew condensation) 85%RH max. (with no ice or dew condensation) About 103 grams
Optional: Versions for N2O and O2 also available. For Ar + CO2, He, and He + O2, please consult factory.
2 MEMS Airflow Sensor D6F-10A, -20A, -50A
Installation: D6F-10A5-000, D6F-20A5-000, D6F-50A5-000
Recommendation for right-angle connection
Tighten screw with 0.59Nm or less torque. Use M3 pan head screw. Please seal to INLET and OUTLET with the ‘O’ ring etc. Please install the product as shown below.
Recommended ‘O’ ring for sealing inlet and outlet orifice Material: NBR70 (recommended) Example part number: JASO part number: CO 0003 Alternative manufacturers with similar DO and W dimensions may be used
■ Precautions
1. Avoid use in excessively dirty, wet environments 2. Do not use in the presence of flammable gases (e.g. hydrogen,
methane, ethane) and liquefied petroleum gas. In addition, do not use with corrosive gases (e.g. chlorine, sulphur, acids, alkalis, etc.). 3. Install in the direction of the arrow indicated. 4. For best results (optimum accuracy), mount horizontally. 5. Use four suitable M3 screws for mounting. Do not exceed a fixing torque of 0.59 Nm. 6. Do not modify D6F- in any way. 7. Do not place any object in or close to the inlet and outlet orifices. 8. Do not use the sensor in any of the following environments: • a location that receives radiant heat from the sun or apparatus
• a place where intense light may radiate down
• places where corrosive gas, especially sulphur and ammonia gases are present
• where fast changing temperatures occur
• locations prone to freezing, high humidity, condensation
• places where large magnitudes of vibration or shock could occur
9. Noise countermeasures: VERY IMPORTANT: Take suitable precautions to m.