• Smallest footprint for compact designs (5 x 7 x 1.55 mm)
• Robust MEMS sensor for harsh environments
• High-volume manufacturing for low-cost applications
• Short lead-times Detectable gases
• Ozone O3 10
– 1000ppb RS / R 100ppb 10 1 0.1 0...
MiCS-2614 PDF File
