± 2g / 4g / 8g Tri-axis Digital Accelerometer Specifications PART NUMBER: KXCJ9-1008 Rev.
5 Dec-2012 Product Description The KXCJ9 is a tri-axis +/-2g, +/-4g or +/-8g silicon micromachined accelerometer.
The sense element is fabricated using Kionix’s proprietary plasma micromachining process technology.
Acceleration sensing is based on the principle of a differential capacitance arising from acceleration-induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress.
The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a gla...

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