(KPY4xR) Silicon Piezoresistive Relative Pressure Sensor
Silicon Piezoresistive Relative Pressure Sensor KPY 41-R KPY 46-R Features • • • • Low pressure and temperature hysteresis Fast response High sensitivity and linearity Fatigue free monocrystaline silicon diaphragm giving high load cycle stability • High long term stability • Pressure coupled to rearside of silicon diaphragm • Built in silicon temperature s...
Siemens Semiconductor