MEMS Mass Flow Sensor D6F-03A3-000 Compact, sensors featuring MEMS technology for precision mass airflow measurement • Precision unidirectional mass airflow up to 3 LPM • Stable output across full scale • Ultra-compact size 36.
6 (L) x 8 (W) x 16.
8 (H) mm • Low power consumption Application Examples • Pick and place systems • Industrial processes • Leak detection • Spectroscopy • Mass flow controllers • Scientific / test equipment • Environmental comfort controls • Fuel cell controls Ordering Information Model D6F-03A3-000 D6F-Cable2 Case Thermoplastic resin / Aluminum alloy *Dry gas must not contain large particles, e.
g.
, dust, oil, mist.
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