Airflow Sensors Microbridge Mass Airflow/Amplified
Figure 1 Heater control circuit
FEATURES ɀ Laser trimmed for improved sensor
interchangeability ɀ Flow sensing up to 1.
0 SLPM ɀ Low differential pressure sensing
Like the AWM2000 Series, the dual Wheatstone bridges control airflow measurement.
The AWM3000 Series is amplified; therefore, it can be used to increase the gain and to introduce
voltage offsets to the sensor output.
The schematic in Figure 3 depicts the amplification circuitry on board the sensor.
Also, the heater control circuit (see Figure 1) and the sensing bridge supply circuit (see Figure 2) are on board the package.
Figure 2 Sensing bridge supply circuit
AWM3000 Series
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