Part Number
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MS7212 |
Manufacturer
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Measurement |
Description
|
PRESSURE SENSOR DIE |
Published
|
Apr 26, 2017 |
Detailed Description
|
MS7212
PRESSURE SENSOR DIE (0-12 BAR) FOR HARSH ENVIRONMENT
• 0 to 1200 kPa range (12 bar or 174 PSI)
• Absolute press...
|
Datasheet
|
MS7212
|
Overview
MS7212
PRESSURE SENSOR DIE (0-12 BAR) FOR HARSH ENVIRONMENT
• 0 to 1200 kPa range (12 bar or 174 PSI)
• Absolute pressure sensors
• Hermetic sensor • RoHS-compatible & Pb-free1
DESCRIPTION
The MS7212 is an absolute silicon micro-machined pressure sensor for harsh environment.
A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a Pyrex™ cap.
The pressure, applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane.
To improve the sensor stability, a drilled Pyrex™ is bonded on the backside.
As the pressure port consists of Pyrex™ and silicon, both stable in most of the chemicals, the MS72...
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