MS7970 PRESSURE SENSOR DIE (0-70 BAR) • 0 to 7000 kPa range (70 bar or 1015 PSI) • Absolute/differential pressure sensors • High linearity, small size • RoHS-compatible & Pb-free1 DESCRIPTION The sensor element of the MS7970 consists of a silicon micro-machined membrane.
Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal.
This sensor, which has outstanding linearity and span values, is available in various configurations.
The absolute pressure sensor employs a sealed vacuum reference cavity underneath the membrane.
The Pyrex glass wafer used for this sealing has a thickness of 0.
2 mm (MS7970-A_0.
2) or 0.
5 m...

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