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FS1012

Part Number	FS1012
Manufacturer	Renesas
Description	Gas and Liquid Flow Sensor
Published	Jun 4, 2020
Detailed Description	FS1012 Datasheet Datasheet Description The FS1012 MEMS mass flow sensor module measures the flow rate using the thermo...
Datasheet	FS1012 PDF File

Overview

FS1012 Datasheet Datasheet Description The FS1012 MEMS mass flow sensor module measures the flow rate using the thermo-transfer (calorimetric) principle.
The FS1012 is capable of measuring a gas or liquid medium.
The FS1012 offers key advantages over resistor-based flow solutions.
The sensor utilizes thermopile sensing, which provides an excellent signal-to-noise ratio.
The sensor comprises a “solid” thermal isolation technology and silicon-carbide coating to protect it from abrasive wear and provides robustness and long-term reliability.
In comparison, other sensors typically contain a fragile membrane above an etched cavity for the thermal isolation base.
The FS1012 features the sensor f...

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