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SM5391

Silicon Microstructures
Part Number SM5391
Manufacturer Silicon Microstructures
Description Gauge and Differential Pressure Sensor
Published Aug 21, 2020
Detailed Description Low Pressure Digital & Analog Sensor SM5291, SM5391, SM5491 Gauge and Differential Pressure Sensor DESCRIPTION The SM5X...
Datasheet PDF File SM5391 PDF File

SM5391
SM5391


Overview
Low Pressure Digital & Analog Sensor SM5291, SM5391, SM5491 Gauge and Differential Pressure Sensor DESCRIPTION The SM5X91 series are a low pressure MEMS sensor family offers state-of-the-art pressure transducer technology and CMOS mixed signal processing technology to produce a digital & analog output, fully conditioned, multi-order pressure and temperature compensated outputs.
This series provides JEDEC standard SOIC-16 package with a dual vertical or horizontal ports options.
It is available in gauge, differential, asymmetric differential configurations.
With the dual porting, a reference measurement is possible to minimize errors due to changes in ambient pressure.
FEATURES • Pressure r...



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