Glass Master. GM-1000 Datasheet

GM-1000 Datasheet PDF


Part Number

GM-1000

Description

Glass Master

Manufacture

Midas

Total Page 2 Pages
Datasheet
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GM-1000
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Product Specification
GM-1000
“Precision, high-speed inspection of glass masters supports our
yield management initiative and greatly improves customer satisfaction."
Glass Master Inspection
Glass masters are critical components used in the manu-
facture of increasingly complex electronic and semicon-
ductor devices. The cost of low yields and defects in
glass/quartz/film glassmasks can be very high -- not only
in terms of dollars
but also in reputa-
tion. To avoid the
possibility of ship-
ping defective glass
or artwork masters,
manufacturers are
now relying upon
automated optical
inspection systems
to increase their pro-
ductivity and
improve outgoing
quality.
GM-1000
MIDAS' GM-1000
The GM-1000 AOI process module inspects glass masters
with resolution down to 3.8 micron. This provides glass
master manufacturers with the immediate feedback neces-
sary to refine their fabrication process and eliminate
defect-causing phenomenon.
The GM-1000 performs fast, accurate and repeatable glass
master inspection. The system provides highly efficient
Pass/Fail decisions while logging valuable information for
process and quality control. Yield-limiting defects such as
particulate, etching discrepancies, and debris are readily
exposed, logged, and optionally presented to an operator
for review.
Robust Operation
Sophisticated defect detection algorithms in the operating
software automatically detect and adapt to non-critical
pattern irregularities, thereby reducing false rejects.
Turn-Key Ready
The GM-1000 comes ready for integration into any manu-
facturing facility as a stand-alone process inspection module.
Highlights
Automatic defect detection ... detects yield-limiting excess-
es, voids and debris on glass masters
High throughput ... less
than 2 minutes for a 234
sq. cm glass master @ 3.8
micron
Flexible ... inspection of
glass masters up to 305
mm x 406 mm
Versatile fixturing ...
universal adaptor with
micro-alignment tools
Glass Master Calibration Standard
High precision ... defect
detection down to 7.6
micron, line and space widths down to 30 micron
Robust ... feature-based variable tolerancing, adaptive defect
analysis, and dual thresholding for low false rejects
(see detailed product specifications on backside)
Yield Management in Glass Master Manufacturing
100%
90%
80%
70%
60%
Human
GM-1000
20%
15%
10%
5%
0%
Human
GM-1000
Preliminary Data

GM-1000
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GM-1000
Preliminary Data
System Specifications
Inspection
Application
Glass master inspection, emulsion or chrome on glass
Part Size
381mm x 483mm (contact factory for other sizes)
Active Inspection 305mm x 406mm (contact factory for other sizes)
Area
Minimum Defect
Size
12.5, 7.6 microns (0.25, 0.15 mil.)
(contact factory for other sizes)
Inspection Rate
610 sq. mm/sec
(contact factory for part-specific inspection rates)
Defects Detected
Pattern or spacing violations
Contamination/debris
Opens, neck-downs, and pinholes
Pattern misregistration
Defect viewed by Stop and Stare camera
Missing conductor shown in red
Inspection
References
Operation
Defect Review
Template creation from a "Golden Sample"
or Gerber 274X CAD-based template using optional CAD2MIDAS software
Defect verification/repair video microscope for on-line
verification or repair
Operation
Measurement
Feature size and location, and emulsion/chrome density
Defect Data
Storage
ASCII delimited files for off-line use
(SPC, Reporting,etc.)
Template Storage
Part Setup Time
Networked server (NET2HOSTTM), hard disk and/or vision processor RAM
3 minutes for 232 cm2 (36 in.2 ), norm
(depends on size and source of inspection template)
Operator
Interface
Windows 2000 ProfessionalTM - based on NT
Two dedicated displays:
1. Graphical process feedback, operator input and machine
status feedback
2. Live video microscope for defect review/repair
Training Time
Operator: 3 hours, norm
Setup technician: 3 days, norm
Options
Software
CAD2MIDASTM - for creating inspection templates based on Gerber 274X
with optional SmartTemplatesTM ATG - automatic template generation
package for creating highly robust inspection templates with variable
sensitivity for ultra-low false calls.
Panel
Fixturing
Universal tooling plate included.
Available options include custom tooling designs, automatic theta
alignment, defect mapping.
Power Fault
Protection
External UPS available.
Electro-Mechanical
Dimensions
Weight
Electrical
Safety
Certifications
97cm W x 117cm D x 183cm H (38”W x 46”D x 72”H)
Electro/Mechanical
231 kg (510 lbs)
110/220 VAC 7 amp (10 amp max)
Semi-S2 compliant
CE, UL Approved
US Headquarters
25 Commercial Drive
Wrentham, MA 02093
www.midasvision.com
Tel: (508) 384-9600
Fax: (508) 384-8183
Email: sales@midasvision.com
Specifications are subject to change without notice. GM-1000 is a trademark of MIDAS Vision Systems, Inc. All rights reserved c 2001.
71201




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