for Photolithography. HSH1000KS Datasheet

HSH1000KS Photolithography. Datasheet pdf. Equivalent

Part HSH1000KS
Description Lamps for Photolithography
Feature D A T A S H E E T Lighting Imaging Telecom Mercury Short Arc Lamps HSH1000KS (ozone free) Lamps.
Manufacture PerkinElmer Optoelectronics
Datasheet
Download HSH1000KS Datasheet

D A T A S H E E T Lighting Imaging Telecom Mercury Short HSH1000KS Datasheet
Recommendation Recommendation Datasheet HSH1000KS Datasheet





HSH1000KS
Lighting
Imaging
Telecom
Mercury Short Arc Lamps
HSH1000KS (ozone free)
Lamps for Photolithography
Description
PerkinElmer Optoelectronics is a leading
manufacturer of mercury short arc lamps
ranging in output power from 1000 to
8000 watts. These lamps are used in the
production of printed circuit boards, liquid
crystal displays and semiconductors. The
HSH Series lamps are used worldwide in
microlithography systems manufactured
by ASML, Canon, GCA, Nikon, Karl
Suss, Ultratech Stepper, and SVG. With
extremely high stability, uniform output
distribution and extended lamp lifetimes,
the HSH Series has become the lamp
choice of many of the world’s leading
semiconductor manufacturers.
hours to more than two thousand hours.
The HSH Series provides longer lifetimes,
outstanding uniformity, and excellent
spectral quality which results in increased
throughput, reduced downtime and an
overall reduction in the cost of ownership.
PerkinElmer has been a leading manufac-
turer of high intensity arc lamps for more
than 30 years and is a premier lamp sup-
plier for solid state lasers, medical equip-
ment, NASA space systems and
microlithography. PerkinElmer has
steadily advanced lamp performance from
1000 watts to 8000 watts. With the intro-
duction of new materials and proprietary
manufacturing processes, we have extend-
ed lamp lifetimes form several hundred
www.perkinelmer.com/opto
Applications
Microlithography
.



HSH1000KS
HSH1000KS
Operational Specifications
Description
Power
Current
Voltage
Current Ripple
Temperature (at base)
Lifetime
Nominal
1000 watts
28 amps (DC)
38 volts (DC)
3%
220ºC (max)
1500 hours
Dimensions
CATHODE (-)
END UP
Ø 41
MAX
Range
1200 watts (max)
23.3-30.3 amps (DC)
33-43 volts (DC)
Physical Specifications
Description
Arc Gap
Anode Base
Cathode Base
Specification
3.0 mm (max)
15 mm Dia (M6-P1.0)
15 mm Dia (M10-P1.5)
Spectral Output
100
90
80
70
60
50
40
30
20
10
0
250 300 350 400 450 500 550 600 650 700 750
Wavelength (nm)
206
240 MAX
91.0
ANODE (+)
END DOWN
All dimensions are in millimeters.
Notes
1. Lamp must be operated with cathode end up and anode
end down. Inclination of lamp axis to vertical must not
exceed 10º.
2. Relative intensity measured at 1000W operating power.
Typical Performance Graph
100
90
80
70
60
50
40
30
20
10
0
0
200
400
600
800
1000
1200
Hours of Operation
1400
Part Number References
Used in Karl Suss, MA4, MA6, MA8, MA200, 25, 150M
Replaces
USH-1000-KS
USH-1005-D
HBO1000W/D
PerkinElmer welcomes inquiries about special lamps. We would be pleased to discuss the requirements of your application and the feasibility of
designing a lamp specifically suited to your needs.
For more information e-mail us at opto@perkinelmer.com or visit our web site at www.perkinelmer.com/opto.
All values are nominal; specifications subject to change without notice.
USA:
PerkinElmer Optoelectronics
44370 Christy St.
Fremont, CA 94538
Phone: (510) 979-6500
Fax: (510) 687-1140
Europe:
PerkinElmer Optoelectronics GmbH
Wenzel-Jaksch-Str. 31
65199 Wiesbaden
Germany
Phone: +49 611 492 0
Fax: +49 611 492 177
Asia:
PerkinElmer Optoelectronics
47 Ayer Rajah Crescent #06-12
Singapore 139947
Phone: +65 775 2022
Fax: +65 775 1008
.
© 2000 PerkinElmer inc. All rights reserved.
www.perkinelmer.com/opto
DS-175 Rev C 0102





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