MPMZ2202 Sensors Datasheet

MPMZ2202 Datasheet PDF, Equivalent


Part Number

MPMZ2202

Description

On-Chip Temperature Compensated and Calibrated Silicon Pressure Sensors

Manufacture

Motorola Semiconductor

Total Page 7 Pages
Datasheet
Download MPMZ2202 Datasheet


MPMZ2202
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Freescale Semiconductor
Technical Data
200 kPa On-Chip Temperature
Compensated and Calibrated
Silicon Pressure Sensors
The MPMZ2202 device is a silicon piezoresistive pressure sensor providing a
highly accurate and linear voltage output directly proportional to the applied
pressure. The sensor is a single, monolithic silicon diaphragm with the strain
gauge and a thin-film resistor network integrated on-chip. The chip is laser
trimmed for precise span and offset calibration and temperature compensation.
Features
• Temperature Compensated Over 0°C to + 85°C
• Available in Easy-to-Use Tape and Reel
• Ratiometric to Supply Voltage
• Gauge Ported and Non Ported Options
• Increased media compatibility fluorocarbon gel
Typical Applications
• Pump/Motor Controllers
• Robotics
• Level Indicators
• Medical Diagnostics
• Pressure Switching
• Barometers
• Altimeters
ORDERING INFORMATION
Device
Type
Options
Case
No.
MPX Series
Order No.
Packing
Options
Device
Marking
Ported
Gauge, Axial 1320A MPMZ2202GS
Port
Rails MPMZ2202GS
Gauge, Axial 1320A MPMZ2202GST1 Tape & Reel MPMZ2202GS
Port
MPMZ2202
Rev 1, 09/2006
MPMZ2202
SERIES
COMPENSATED AND CALIBRATED
PRESSURE SENSOR
0 TO 200 kPA (0 TO 29 psi)
40 mV FULL SCALE SPAN
(TYPICAL)
MPAK PACKAGE
MPMZ2202GS
CASE 1320A-02
PIN NUMBER
1 GND 3
VS
2 +VOUT 4 -VOUT
© Freescale Semiconductor, Inc., 2006. All rights reserved.

MPMZ2202
www.DataSheet4U.com
Figure 1 shows a block diagram of the internal circuitry on the stand-alone pressure sensor chip.
VS
3
X-ducer
Sensing
Element
Thin Film
Temperature
Compensation
and
Calibration
Circuitry
2 VOUT+
4 VOUT-
1
GND
Figure 1. Temperature Compensated Pressure Sensor Schematic
VOLTAGE OUTPUT VERSUS
APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the sensor is directly
proportional to the differential pressure applied.
Table 1. Maximum Ratings(1)
The output voltage of the differential or gauge sensor
increases with increasing pressure applied to the pressure
side relative to the vacuum side. Similarly, output voltage
increases as increasing vacuum is applied to the vacuum
side relative to the pressure side.
Rating
Symbol
Value
Unit
Maximum Pressure
Pmax
400
Storage Temperature
Tstg -40 to +125
Operating Temperature
TA -40 to +125
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
kPa
°C
°C
MPMZ2202
2
Sensors
Freescale Semiconductor


Features www.DataSheet4U.com Freescale Semicondu ctor Technical Data MPMZ2202 Rev 1, 09 /2006 200 kPa On-Chip Temperature Comp ensated and Calibrated Silicon Pressure Sensors The MPMZ2202 device is a silic on piezoresistive pressure sensor provi ding a highly accurate and linear volta ge output directly proportional to the applied pressure. The sensor is a singl e, monolithic silicon diaphragm with th e strain gauge and a thin-film resistor network integrated on-chip. The chip i s laser trimmed for precise span and of fset calibration and temperature compen sation. Features • • • • • Te mperature Compensated Over 0°C to + 85 °C Available in Easy-to-Use Tape and R eel Ratiometric to Supply Voltage Gauge Ported and Non Ported Options Increase d media compatibility fluorocarbon gel MPMZ2202 SERIES COMPENSATED AND CALIB RATED PRESSURE SENSOR 0 TO 200 kPA (0 T O 29 psi) 40 mV FULL SCALE SPAN (TYPICA L) MPAK PACKAGE Typical Applications • • • • • • • Pump/Motor Controllers Robotics Level Indicators Medical Diag.
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