PRESSURE SENSORS. MPXM2202 Datasheet

MPXM2202 SENSORS. Datasheet pdf. Equivalent

Part MPXM2202
Description 200 KPA ON CHIP TEMPERATURE COMPENSATED & CALIBRATED SILICON PRESSURE SENSORS
Feature www.DataSheet4U.com SEMICONDUCTOR TECHNICAL DATA MOTOROLA Freescale Semiconductor, Inc. Order thi.
Manufacture Motorola
Datasheet
Download MPXM2202 Datasheet



MPXM2202
MOTOROLA
Freescale Semiconductor, Inc.
www.DaStaESMheIeCt4OUN.cDomUCTOR TECHNICAL DATA
Order this document
by MPXM2202/D
200 kPa
On-Chip Temperature
Compensated & Calibrated
Silicon Pressure Sensors
The MPXM2202 device is a silicon piezoresistive pressure sensors providing a highly
accurate and linear voltage output — directly proportional to the applied pressure. The
sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin–film
resistor network integrated on–chip. The chip is laser trimmed for precise span and offset
calibration and temperature compensation.
Features
Temperature Compensated Over 0°C to +85°C
Available in Easy-to-Use Tape & Reel
Ratiometric to Supply Voltage
Gauge Ported & Non Ported Options
Application Examples
Pump/Motor Controllers
Robotics
Level Indicators
Medical Diagnostics
Pressure Switching
Barometers
Altimeters
Figure 1 shows a block diagram of the internal circuitry on the stand–alone pressure
sensor chip.
VS
3
X-ducer
SENSING
ELEMENT
THIN FILM
TEMPERATURE
COMPENSATION
AND
CALIBRATION
CIRCUITRY
2 Vout+
4 Vout-
1
GND
Figure 1. Temperature Compensated Pressure Sensor Schematic
VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE
The differential voltage output of the sensor is directly proportional to the differential
pressure applied.
The output voltage of the differential or gauge sensor increases with increasing
pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly,
output voltage increases as increasing vacuum is applied to the vacuum side (P2)
relative to the pressure side (P1).
Preferred devices are Motorola recommended choices for future use and best overall value.
MPXM2202
SERIES
Motorola Preferred Device
0 to 200 kPa (0 to 29 psi)
40 mV FULL SCALE SPAN
(TYPICAL)
MPAK PACKAGE
SCALE 1:1
CASE 1320
SCALE 1:1
CASE 1320A
PIN NUMBER
1 Gnd
3 VS
2 +Vout
4 –Vout
REV 0
© Motorola, Inc. 2001
For More Information On This Product,
Go to: www.freescale.com



MPXM2202
MPXM2202 SERIES
Freescale Semiconductor, Inc.
MAXIMUM RATINGS(NOTE)
Rating
Symbol
Value
Maximum Pressure (P1 > P2)
Pmax
400
Storage Temperature
Tstg –40 to +125
Operating Temperature
TA –40 to +125
NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device.
Unit
kPa
°C
°C
OPERATING CHARACTERISTICS (VS = 10 Vdc, TA = 25°C unless otherwise noted, P1 > P2)
Characteristic
Symbol
Min
Pressure Range(1)
Supply Voltage(2)
POP
VS
0
Supply Current
Full Scale Span(3)
Offset(4)
MPXM2202D/G Series
MPXM2202A Series
Io
VFSS
Voff
38.5
–1.0
–2.0
Typ
10
6.0
40
Max Unit
200 kPa
16 Vdc
— mAdc
41.5 mV
1.0 mV
2.0
Sensitivity
Linearity(5)
MPXM2202D/G Series
MPXM2202A Series
Pressure Hysteresis(5) (0 to 100 kPa)
Temperature Hysteresis(5) (–40°C to +125°C)
Temperature Effect on Full Scale Span(5)
Temperature Effect on Offset(5)
Input Impedance
Output Impedance
Response Time(6) (10% to 90%)
Warm–Up
Offset Stability(7)
V/P
TCVFSS
TCVoff
Zin
Zout
tR
–0.6
–1.0
–2.0
–1.0
1000
1400
0.2
±0.1
±0.5
1.0
20
±0.5
0.4
1.0
2.0
1.0
2500
3000
mV/kPa
%VFSS
%VFSS
%VFSS
%VFSS
mV
ms
ms
%VFSS
NOTES:
1. 1.0 kPa (kiloPascal) equals 0.145 psi.
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional
error due to device self–heating.
3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the
minimum rated pressure.
4. Offset (Voff) is defined as the output voltage at the minimum rated pressure.
5. Accuracy (error budget) consists of the following:
Linearity:
Output deviation from a straight line relationship with pressure, using end point method, over the specified
pressure range.
Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is
cycled to and from the minimum or maximum operating temperature points, with zero differential pressure
applied.
Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the
minimum or maximum rated pressure, at 25°C.
TcSpan:
Output deviation at full rated pressure over the temperature range of 0 to 85°C, relative to 25°C.
TcOffset:
Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85°C, relative
to 25°C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to
a specified step change in pressure.
7. Offset stability is the product’s output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
2 For More Information On This Product, Motorola Sensor Device Data
Go to: www.freescale.com







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