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KXPS5-3157

Kionix
Part Number KXPS5-3157
Manufacturer Kionix
Description Tri-axis Accelerometer
Published Jan 31, 2019
Detailed Description ±3g Tri-axis Accelerometer Specifications PART NUMBER: KXPS5-3157 Rev. 3 Sep-2009 Product Description The KXPS5-3157 i...
Datasheet PDF File KXPS5-3157 PDF File

KXPS5-3157
KXPS5-3157

Overview
±3g Tri-axis Accelerometer Specifications PART NUMBER: KXPS5-3157 Rev.
3 Sep-2009 Product Description The KXPS5-3157 is a Tri-axis, silicon micromachined accelerometer with a full-scale output range of +/-3g (29.
4 m/s/s).
The sense element is fabricated using Kionix’s proprietary plasma micromachining process technology.
Acceleration sensing is based on the principle of a differential capacitance arising from acceleration-induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress.
The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the ...


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